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Plate wave devices with wave confinement structures and fabrication methods
K Bhattacharjee - US Patent 10,389,332, 2019 - Google Patents
ABSTRACT A micro-electrical-mechanical system (MEMS) guided wave device includes a
single crystal piezoelectric layer and at least one guided wave confinement structure …
single crystal piezoelectric layer and at least one guided wave confinement structure …
Method for manufacturing a vibrating MEMS circuit
SS Li, S Lee, K Bhattacharjee - US Patent 9,369,105, 2016 - Google Patents
6,249,073 B1 6/2001 Nguyen et al. 6,336,366 B1 1/2002 Thundat et al. 6,349,454 B1*
2/2002 Manfra et al................ 29, 25.35 6,437.486 B1 8, 2002 BurcSu et al. 6,767,749 B2 …
2/2002 Manfra et al................ 29, 25.35 6,437.486 B1 8, 2002 BurcSu et al. 6,767,749 B2 …
Guided wave devices with selectively thinned piezoelectric layers
K Bhattacharjee - US Patent 10,530,329, 2020 - Google Patents
(57) ABSTRACT A micro-electrical-mechanical system (MEMS) guided wave device
includes a plurality of electrodes arranged below a piezoelectric layer (eg, either embedded …
includes a plurality of electrodes arranged below a piezoelectric layer (eg, either embedded …
Guided wave devices with embedded electrodes and non-embedded electrodes
K Bhattacharjee - US Patent 10,211,806, 2019 - Google Patents
(57) ABSTRACT A micro-electrical-mechanical system (MEMS) guided wave device
includes a plurality of electrodes arranged below a piezoelectric layer (eg, either embedded …
includes a plurality of electrodes arranged below a piezoelectric layer (eg, either embedded …
Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators
PJ Stephanou, SJ Park, RV Shenoy - US Patent 9,178,256, 2015 - Google Patents
This disclosure provides implementations of electromechani cal systems (EMS) resonator
structures, devices, apparatus, systems, and related processes. In one aspect, a device …
structures, devices, apparatus, systems, and related processes. In one aspect, a device …
MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
K Bhattacharjee, S Zhgoon - US Patent 9,391,588, 2016 - Google Patents
(57) ABSTRACT A micro-electrical-mechanical system (MEMS) vibrating structure includes a
carrier Substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a …
carrier Substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a …
Guided wave devices with selectively loaded piezoelectric layers
K Bhattacharjee - US Patent 10,326,426, 2019 - Google Patents
A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of
electrodes arranged below a piezoelectric layer (eg, either embedded in a slow wave …
electrodes arranged below a piezoelectric layer (eg, either embedded in a slow wave …
Microelectromechanical resonator
JC Doll, N Miller, CI Grosjean, PM Hagelin… - US Patent …, 2017 - Google Patents
In a MEMS device having a substrate and a moveable micromachined member, a
mechanical structure secures the moveable micromachined member to the substrate, ther …
mechanical structure secures the moveable micromachined member to the substrate, ther …
Multi-frequency guided wave devices and fabrication methods
K Bhattacharjee - US Patent 10,348,269, 2019 - Google Patents
(57) ABSTRACT A micro-electrical-mechanical system (MEMS) guided wave device
includes a piezoelectric layer including mul tiple thinned regions of different thicknesses …
includes a piezoelectric layer including mul tiple thinned regions of different thicknesses …
Micromechanical resonators
Embodiments of the invention include micromechanical resonators. These resonators can
be fabricated from thin silicon layers. Both rotational and translational resonators are …
be fabricated from thin silicon layers. Both rotational and translational resonators are …