Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development
The primary requirement for the development of tools for extreme ultraviolet lithography
(EUVL) has been the identification and optimization of suitable sources. These sources must …
(EUVL) has been the identification and optimization of suitable sources. These sources must …
[HTML][HTML] High-resolution spectroscopic imaging of atoms and nanoparticles in thin film vaporization
We introduce a spectroscopic absorption imaging method in the UV regime (225–400 nm) to
study tin vapor created by irradiating a thin film with a low intensity 10 8 W cm− 2 …
study tin vapor created by irradiating a thin film with a low intensity 10 8 W cm− 2 …
[PDF][PDF] 极紫外光刻光源的研究进展及发展趋势
林楠， 杨文河， 陈韫懿， 魏鑫， 王成， 赵娇玲… - Laser & …, 2022 - researching.cn
摘要随着芯片特征尺寸的不断减小, 借助193 nm 准分子光源的浸没式深紫外光刻技术已进入
瓶颈, 使用多次曝光技术的工艺路线也已到达目前的商用极限. 极紫外光刻(EUVL) 采用13. 5 nm …
瓶颈, 使用多次曝光技术的工艺路线也已到达目前的商用极限. 极紫外光刻(EUVL) 采用13. 5 nm …
Sources for beyond extreme ultraviolet lithography and water window imaging
Lithography tools are being built and shipped to semiconductor manufacturers for high
volume manufacturing using extreme ultraviolet lithography (EUVL) at a wavelength of 13.5 …
volume manufacturing using extreme ultraviolet lithography (EUVL) at a wavelength of 13.5 …
Scaling relations in laser-induced vaporization of thin free-flying liquid metal sheets
We experimentally study the vaporization of free-flying liquid tin sheets when exposed to a
100-ns laser pulse with an intensity between 0.2× 10 7 and 4× 10 7 W/cm 2, a case inspired …
100-ns laser pulse with an intensity between 0.2× 10 7 and 4× 10 7 W/cm 2, a case inspired …
[HTML][HTML] Stagnation layer development from two colliding Sn plasmas for an efficient EUV source
J Oliver, T Sizyuk - Physics of Plasmas, 2019 - pubs.aip.org
The collision of two laser-produced plasmas (LPP), individually generated from the
opposing faces of a tin wedge, was studied experimentally and through the HEIGHTS …
opposing faces of a tin wedge, was studied experimentally and through the HEIGHTS …
Target geometrical effects on the stagnation layer formed by colliding a pair of laser produced copper plasmas
We present the results of a time and space resolved optical-spectroscopic study of colliding
plasmas formed at the front surfaces of flat and inclined Cu slab targets as a function of both …
plasmas formed at the front surfaces of flat and inclined Cu slab targets as a function of both …
Influence of laser-induced Au-plasma plume collision on the efficiency of x-ray radiations and the energy-transport process relevant to ICF
Y Zhang, W Yuan, T Song, Z Lei, Z Zhang, B Qing… - Nuclear …, 2024 - iopscience.iop.org
Experiments and simulations have been carried out to study the colliding process by two
lasers irradiating a gold half-hohlraum. Via analyzing the evolutionary x-ray images …
lasers irradiating a gold half-hohlraum. Via analyzing the evolutionary x-ray images …
[HTML][HTML] Experimental study of the dynamics and extreme ultraviolet radiation of laser produced colliding Sn plasmas
The advanced research on bright 13.5 nm extreme ultraviolet (EUV) light sources with low
debris is of crucial importance for the semiconductor industry. The scheme of laser produced …
debris is of crucial importance for the semiconductor industry. The scheme of laser produced …
[HTML][HTML] Mechanisms of carbon dimer formation in colliding laser-produced carbon plasmas
It has been demonstrated that the hot stagnation region formed during the collision of laser-
produced carbon plasmas is rich with carbon dimers which have been shown to be …
produced carbon plasmas is rich with carbon dimers which have been shown to be …