In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …

In this paper, a novel graphene-based optical micro-electro-mechanical systems (MEMS)
accelerometer sensor is proposed, which is relied on unique properties of graphene and …

In this paper, a novel optical microelectromechanical systems accelerometer sensor is
proposed by using a two-dimensional photonic crystal add-drop filter which is relied on a …

The micro-electromechanical-system (MEMS) force and acceleration sensor, based on the
graphene-induced non-radiative transition, was investigated using analytical solution and …

In this paper, a novel highly sensitive differential optical MEMS accelerometer based on
intensity modulation is proposed by using dual optical outputs and a two-dimensional (2D) …

This paper proposes a novel graphene‐based optical microelectromechanical systems
MEMS accelerometer that is dependent on the intensity modulation and optical properties of …

In this article, a novel optical micro-electromechanical system (MEMS) acceleration sensor
based on a metal Fabry–Pérot (FP) microcavity is investigated using the transfer matrix …

In this article, a novel optical Bio-microelectromechanical system (MEMS) sensing platform
is proposed based on a tunable laser and its lasing wavelength to detect the biomolecules …

In this paper, an ultra-sensitive nano-displacement sensing system consisting of an all-
dielectric and mechanically tunable metamaterial has been presented. The proposed sensor …

Optomechanical crystal cavities are devices based on optomechanical interactions to
manipulate photons and phonons on periodic subwavelength structures, enabling precise …