Smart sensing for aeronautical applications is a multidisciplinary process that involves the
development of various sensor elements and advancements in the nanomaterials field. The …

MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer which combines the merits of optical measurement and Micro-Electro …

Micro-optical electromechanical systems (MOEMS) combine the merits of micro-
electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a …

Laser interferometry is one of the most accurate measurement technologies whose
displacement resolution can reach the femtometer (fm) level. With the development of Micro …

The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational
analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high …

This study proposes a highly stable differential resonant accelerometer that is monolithically
micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of …

Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of
microscale/nanoscale science, mechanical engineering, electronic engineering, and control …

In this paper, we design a monolithic integrated micro-opto-electromechanical system
(MOEMS) accelerometer based on the Michelson interferometer structure. The …