A review of eigenmode and frequency control in piezoelectric MEMS resonators
Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …
properties, such as strong electromechanical coupling, high, and polarized linear …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
Temperature dependence of the elastic constants of doped silicon
Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …
frequency-temperature dependence compared with lightly doped silicon. The resonant …
Concepts and key technologies of microelectromechanical systems resonators
T Feng, Q Yuan, D Yu, B Wu, H Wang - Micromachines, 2022 - mdpi.com
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …
mechanisms of MEMS resonators are described. By reviewing the existing representative …
Accurate modeling of quality factor behavior of complex silicon MEMS resonators
The quality factor of a resonator represents the decay of vibrational energy over time, and is
directly related to the frequency response and other key parameters that determine …
directly related to the frequency response and other key parameters that determine …
A temperature-stable and low impedance piezoelectric MEMS resonator for drop-in replacement of quartz crystals
In this letter, we report a highly temperature-stable and low impedance scandium doped
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …
4H-silicon carbide as an acoustic material for MEMS
This article discusses the potential of 4H-silicon carbide (SiC) as a superior acoustic
material for microelectromechanical systems (MEMS), particularly for high-performance …
material for microelectromechanical systems (MEMS), particularly for high-performance …
Low-power dual mode MEMS resonators with PPB stability over temperature
We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …
Temperature compensated bulk-mode capacitive MEMS resonators with±16 ppm temperature stability over industrial temperature ranges
This letter reports temperature compensated single crystal silicon (SCS) bulk-mode
capacitive microelectromechanical system (MEMS) resonators with high temperature …
capacitive microelectromechanical system (MEMS) resonators with high temperature …
[HTML][HTML] Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals
In this article, a two-dimensional (2D) honeycomb lattice phononic crystal (PnC) based micro-
oven with large bandgap is introduced to be integrated with piezoelectric …
oven with large bandgap is introduced to be integrated with piezoelectric …