Optical wafer defect inspection at the 10 nm technology node and beyond
The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …
constitutes the primary driving force for marching down the path of decreased critical …
[HTML][HTML] A review of common-path off-axis digital holography: towards high stable optical instrument manufacturing
Digital holography possesses the advantages of wide-field, non-contact, precise, and
dynamic measurements for the complex amplitude of object waves. Today, digital …
dynamic measurements for the complex amplitude of object waves. Today, digital …
Solving inverse scattering problems in biological samples by quantitative phase imaging
Quantitative phase imaging (QPI), a method that precisely recovers the wavefront of an
electromagnetic field scattered by a transparent, weakly scattering object, is a rapidly …
electromagnetic field scattered by a transparent, weakly scattering object, is a rapidly …
[HTML][HTML] Large field‐of‐view holographic imager with ultra‐high phase sensitivity using multi‐angle illumination
Quantitative phase imaging and holography allow highly sensitive detection of phase
changes, for example of surface non-uniformities or refractive index (RI) structures in the …
changes, for example of surface non-uniformities or refractive index (RI) structures in the …
Portable quantitative phase microscope for material metrology and biological imaging
Quantitative phase microscopy (QPM) has emerged as an important tool for material
metrology and biological imaging. For broader adoption in those applications, we have …
metrology and biological imaging. For broader adoption in those applications, we have …
Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence
In integrated circuit (IC) manufacturing, fast, nondestructive, and precise detection of defects
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …
Live Cell Imaging by Single-Shot Common-Path Wide Field-of-View Reflective Digital Holographic Microscope
Quantitative phase imaging by digital holographic microscopy (DHM) is a nondestructive
and label-free technique that has been playing an indispensable role in the fields of science …
and label-free technique that has been playing an indispensable role in the fields of science …
Demosaiced pixel super-resolution for multiplexed holographic color imaging
To synthesize a holographic color image, one can sequentially take three holograms at
different wavelengths, eg, at red (R), green (G) and blue (B) parts of the spectrum and …
different wavelengths, eg, at red (R), green (G) and blue (B) parts of the spectrum and …
Optical inspection of nanoscale structures using a novel machine learning based synthetic image generation algorithm
In this paper, we present a novel interpretable machine learning technique that uses unique
physical insights about noisy optical images and a few training samples to classify …
physical insights about noisy optical images and a few training samples to classify …
Lensless digital holographic microscopy as an efficient method to monitor enzymatic plastic degradation
A big challenge of the 21st century is to cope with the huge amounts of plastic waste on
Earth. Especially the oceans are heavily polluted with plastics. To counteract this issue …
Earth. Especially the oceans are heavily polluted with plastics. To counteract this issue …