Epitaxial oxide thin films on Si (001)

Z Yu, J Ramdani, JA Curless, CD Overgaard… - Journal of Vacuum …, 2000 - pubs.aip.org
Over the years, the development of epitaxial oxides on silicon has been a great
technological challenge. Amorphous silicon oxide layer forms quickly at the interface when …

Mechanism of cleaning Si(100) surface using Sr or SrO for the growth of crystalline films

Y Wei, X Hu, Y Liang, DC Jordan, B Craigo… - Journal of Vacuum …, 2002 - pubs.aip.org
A method for removing SiO 2 and producing an ordered Si (100) surface using Sr or SrO has
been developed. In this technique, a few monolayers of Sr or SrO are deposited onto the as …

High-Tc superconductors on buffered silicon: materials properties and device applications

J Qiao, CY Yang - Materials Science and Engineering: R: Reports, 1995 - Elsevier
The discovery of ceramic superconductors with critical temperatures that overlap the
operating temperatures of most silicon devices has led to efforts to incorporate these …

Epitaxial ferroelectric oxides on silicon with perspectives for future device applications

M Spreitzer, D Klement, T Parkelj Potočnik… - APL materials, 2021 - pubs.aip.org
Functional oxides on silicon have been the subject of in-depth research for more than 20
years. Much of this research has been focused on the quality of the integration of materials …

Electrical properties of (Zr,Sn)TiO4 dielectric thin film prepared by pulsed laser deposition

O Nakagawara, Y Toyota, M Kobayashi… - Journal of Applied …, 1996 - pubs.aip.org
We have been successful in obtaining temperature‐stable crystallized thin film of (Zr, Sn)
TiO4. Preferential (111)‐oriented (Zr, Sn) TiO4 thin film was prepared by pulsed laser …

Ferroelectric Properties of Vertically Aligned Nanostructured BaTiO3–CeO2 Thin Films and Their Integration on Silicon

F Khatkhatay, A Chen, JH Lee, W Zhang… - … applied materials & …, 2013 - ACS Publications
Epitaxial (BaTiO3) 0.5 (CeO2) 0.5 films have been deposited in vertically aligned
nanocomposite form on SrTiO3/TiN buffered Si substrates to achieve high-quality …

Epitaxial perovskite thin films grown on silicon by molecular beam epitaxy

Z Yu, J Ramdani, JA Curless, JM Finder… - Journal of Vacuum …, 2000 - pubs.aip.org
Thin film perovskite-type oxide SrTiO 3 has been grown epitaxially on Si (001) substrate by
molecular beam epitaxy. Reflection high energy electron diffraction and x-ray diffraction …

Effects of buffer layers in epitaxial growth of SrTiO3 thin film on Si(100)

O Nakagawara, M Kobayashi, Y Yoshino… - Journal of applied …, 1995 - pubs.aip.org
SrTiO3 thin film has been formed on Si (100) substrates with various single buffer layers
such as SrO, CeO2, CaF2, CoSi2 and a multibuffer layer, YSZ/Y2O3/YBa2Cu3O7 by ArF …

Studies on structural and electrical properties of barium strontium titanate thin films developed by metallo-organic decomposition

SB Krupanidhi, CJ Peng - Thin Solid Films, 1997 - Elsevier
Thin films of barium strontium titanate (BST) including BaTiO3 and SrTiO3 end members
were deposited using the metallo-organic decomposition (MOD) technique. Processing …

Pulsed laser deposition of diamond from graphite targets

MC Polo, J Cifre, G Sanchez, R Aguiar, M Varela… - Applied physics …, 1995 - pubs.aip.org
Diamond crystals of 1 μm mean size were grown on (100) silicon substrates by ArF (193 nm)
laser ablation of graphite in a hydrogen atmosphere with a laser power density of 1.3× 108 …