Silicon MEMS inertial sensors evolution over a quarter century

G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Bias modulation of force-to-rebalanced micro hemispherical resonator gyroscope based on mode-rotation

X Ding, Z Ruan, Y Pu, H Zhang, H Li… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
This paper presents a bias modulation method for the force-to-rebalanced (FTR) micro
hemispherical resonator gyroscope (HRG) based on the mode-rotation, which is achieved …

A Novel Self-modulation Method for Whole Angle Resonator Gyroscope Based on High Harmonic Compensation

X Yi, G Yang, Q Cai, R Cheng, Y Tu… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
The whole-angle resonator gyroscopes (WARGs) have garnered significant attention as they
break the contradiction between precision and volume in traditional gyroscopes. Self …

[HTML][HTML] Interactive errors analysis and scale factor nonlinearity reduction methods for Lissajous frequency modulated MEMS gyroscope

R Li, X Wang, K Yan, Z Chen, Z Ma, X Wang, A Zhang… - Sensors, 2023 - mdpi.com
Although the Lissajous frequency modulated (LFM) mode can improve the long-term and
temperature stability of the scale factor (SF) for mode mismatch MEMS gyroscopes, its SF …

A Microactuation and Sensing Platform With Active Lockdown for In Situ Calibration of Scale Factor Drifts in Dual-Axis Gyroscopes

EE Aktakka, JK Woo, D Egert… - IEEE/ASME …, 2014 - ieeexplore.ieee.org
This paper presents the design and experimental results of a microvibratory actuation and
sensing platform to provide on-chip physical stimulus for in situ calibration of long-term scale …