Si-incorporated amorphous indium oxide thin-film transistors

S Aikawa, T Nabatame… - Japanese Journal of …, 2019 - iopscience.iop.org
Amorphous oxide semiconductors, especially indium oxide-based (InO x) thin films, have
been major candidates for high mobility with easy-to-use device processability. As for a …

Significance of Pairing In/Ga Precursor Structures on PEALD InGaOx Thin-Film Transistor

TH Hong, HJ Jeong, HM Lee, SH Choi… - … Applied Materials & …, 2021 - ACS Publications
Atomic layer deposition (ALD) is a promising deposition method to precisely control the
thickness and metal composition of oxide semiconductors, making them attractive materials …

Synergistic boron do** of semiconductor and dielectric layers for high-performance metal oxide transistors: interplay of experiment and theory

X Zhang, B Wang, W Huang, Y Chen… - Journal of the …, 2018 - ACS Publications
We report the results of a study to enhance metal oxide (MO) thin-film transistor (TFT)
performance by do** both the semiconductor (In2O3) and gate dielectric (Al2O3) layers …

Frequency-agile low-temperature solution-processed alumina dielectrics for inorganic and organic electronics enhanced by fluoride do**

X Zhuang, S Patel, C Zhang, B Wang… - Journal of the …, 2020 - ACS Publications
The frequency-dependent capacitance of low-temperature solution-processed metal oxide
(MO) dielectrics typically yields unreliable and unstable thin-film transistor (TFT) …

In2O3-based thin-film transistors with a (400) polar surface for CO2 gas detection at 150° C

A Nodera, S Aikawa - Materials Science and Engineering: B, 2024 - Elsevier
Because of increasing demand for CO 2 detection, CO 2 sensors capable of low-
temperature operation are desired. However, conventional oxide semiconductor sensors still …

Performance enhancement for tungsten-doped indium oxide thin film transistor by hydrogen peroxide as cosolvent in room-temperature supercritical fluid systems

DB Ruan, PT Liu, MC Yu, TC Chien… - … applied materials & …, 2019 - ACS Publications
In this study, hydrogen peroxide (H2O2) cosolvent, which was dissolved into supercritical-
phase carbon dioxide fluid (SCCO2), is employed to passivate excessive oxygen vacancies …

High-performance thin-film transistors with aqueous solution-processed NiInO channel layer

Y Li, W Xu, W Liu, S Han, P Cao, M Fang… - ACS Applied …, 2019 - ACS Publications
We report the aqueous-solution-processed Ni-doped In2O3 (Ni x In2–x O3, NiInO) thin-film
transistors (TFTs) for the first time. The effect of Ni do** on In2O3 microstructure, oxygen …

Mobility enhancement for high stability tungsten-doped indium-zinc oxide thin film transistors with a channel passivation layer

DB Ruan, PT Liu, YC Chiu, PY Kuo, MC Yu, K Gan… - RSC …, 2018 - pubs.rsc.org
This study investigates the electrical characteristics and physical analysis for an amorphous
tungsten-doped indium-zinc oxide thin film transistor with different backchannel passivation …

Homogeneous double-layer amorphous Si-doped indium oxide thin-film transistors for control of turn-on voltage

T Kizu, S Aikawa, T Nabatame, A Fujiwara… - Journal of Applied …, 2016 - pubs.aip.org
We fabricated homogeneous double-layer amorphous Si-doped indium oxide (ISO) thin-film
transistors (TFTs) with an insulating ISO cap layer on top of a semiconducting ISO bottom …

Comparison of characteristics of thin-film transistor with In2O3 and carbon-doped In2O3 channels by atomic layer deposition and post-metallization annealing in O3

R Kobayashi, T Nabatame, T Onaya… - Japanese Journal of …, 2021 - iopscience.iop.org
Characteristics of thin-film transistors (TFTs) with amorphous In 2 O 3 (InO 1.2) and carbon-
doped In 2 O 3 (InO 1.16 C 0.04) channels by post-metallization annealing (PMA) process …