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Si-incorporated amorphous indium oxide thin-film transistors
Amorphous oxide semiconductors, especially indium oxide-based (InO x) thin films, have
been major candidates for high mobility with easy-to-use device processability. As for a …
been major candidates for high mobility with easy-to-use device processability. As for a …
Significance of Pairing In/Ga Precursor Structures on PEALD InGaOx Thin-Film Transistor
TH Hong, HJ Jeong, HM Lee, SH Choi… - … Applied Materials & …, 2021 - ACS Publications
Atomic layer deposition (ALD) is a promising deposition method to precisely control the
thickness and metal composition of oxide semiconductors, making them attractive materials …
thickness and metal composition of oxide semiconductors, making them attractive materials …
Synergistic boron do** of semiconductor and dielectric layers for high-performance metal oxide transistors: interplay of experiment and theory
We report the results of a study to enhance metal oxide (MO) thin-film transistor (TFT)
performance by do** both the semiconductor (In2O3) and gate dielectric (Al2O3) layers …
performance by do** both the semiconductor (In2O3) and gate dielectric (Al2O3) layers …
Frequency-agile low-temperature solution-processed alumina dielectrics for inorganic and organic electronics enhanced by fluoride do**
The frequency-dependent capacitance of low-temperature solution-processed metal oxide
(MO) dielectrics typically yields unreliable and unstable thin-film transistor (TFT) …
(MO) dielectrics typically yields unreliable and unstable thin-film transistor (TFT) …
In2O3-based thin-film transistors with a (400) polar surface for CO2 gas detection at 150° C
A Nodera, S Aikawa - Materials Science and Engineering: B, 2024 - Elsevier
Because of increasing demand for CO 2 detection, CO 2 sensors capable of low-
temperature operation are desired. However, conventional oxide semiconductor sensors still …
temperature operation are desired. However, conventional oxide semiconductor sensors still …
Performance enhancement for tungsten-doped indium oxide thin film transistor by hydrogen peroxide as cosolvent in room-temperature supercritical fluid systems
In this study, hydrogen peroxide (H2O2) cosolvent, which was dissolved into supercritical-
phase carbon dioxide fluid (SCCO2), is employed to passivate excessive oxygen vacancies …
phase carbon dioxide fluid (SCCO2), is employed to passivate excessive oxygen vacancies …
High-performance thin-film transistors with aqueous solution-processed NiInO channel layer
We report the aqueous-solution-processed Ni-doped In2O3 (Ni x In2–x O3, NiInO) thin-film
transistors (TFTs) for the first time. The effect of Ni do** on In2O3 microstructure, oxygen …
transistors (TFTs) for the first time. The effect of Ni do** on In2O3 microstructure, oxygen …
Mobility enhancement for high stability tungsten-doped indium-zinc oxide thin film transistors with a channel passivation layer
This study investigates the electrical characteristics and physical analysis for an amorphous
tungsten-doped indium-zinc oxide thin film transistor with different backchannel passivation …
tungsten-doped indium-zinc oxide thin film transistor with different backchannel passivation …
Homogeneous double-layer amorphous Si-doped indium oxide thin-film transistors for control of turn-on voltage
We fabricated homogeneous double-layer amorphous Si-doped indium oxide (ISO) thin-film
transistors (TFTs) with an insulating ISO cap layer on top of a semiconducting ISO bottom …
transistors (TFTs) with an insulating ISO cap layer on top of a semiconducting ISO bottom …
Comparison of characteristics of thin-film transistor with In2O3 and carbon-doped In2O3 channels by atomic layer deposition and post-metallization annealing in O3
Characteristics of thin-film transistors (TFTs) with amorphous In 2 O 3 (InO 1.2) and carbon-
doped In 2 O 3 (InO 1.16 C 0.04) channels by post-metallization annealing (PMA) process …
doped In 2 O 3 (InO 1.16 C 0.04) channels by post-metallization annealing (PMA) process …