This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

This article reports on the modeling, design, fabrication, and testing of high-performance X-
cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The …

In this letter, we report a highly temperature-stable and low impedance scandium doped
aluminum nitride (Sc x AI 1-x N,%) on silicon piezoelectric microelectromechanical system …

This article presents a new design of supporting tethers through the concept of force
distribution. The transmitted force applied on tethers will be distributed on the new tether …

We report on the first experimental demonstration of five self-sustaining feedback oscillators
referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon …

Boron (B)-substituted wurtzite AlN (Al1–x B x N) is a recently discovered wurtzite ferroelectric
material that offers several advantages over ferroelectric Hf1–x Zr x O2 and PbZr1–x Ti x O3 …

In this work, we present a novel unidirectional transducer design for frequency scaling
aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness …

This paper reports on the demonstration of ultrafast (thermal time constant, τ∼ 166 μs) and
high resolution (noise equivalent power, NEP∼ 549 pW/Hz 1/2) thermal detectors based on …

This paper reports on a platform for monolithic integration of piezoelectric and piezoresistive
devices on a single chip using the ScAlN/3C-SiC/Si heterostructure. Surface acoustic wave …