[HTML][HTML] High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications

D Vasilache, C Nastase, G Boldeiu, M Nedelcu… - Micromachines, 2025 - mdpi.com
This paper presents the simulation and experimental results for high-frequency surface
acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength …