A review of micromachined thermal accelerometers
A thermal convection based micro-electromechanical accelerometer is a relatively new kind
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …
Micromachined fluid inertial sensors
S Liu, R Zhu - Sensors, 2017 - mdpi.com
Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly
includes thermal accelerometers and fluid gyroscopes, which have now been developed …
includes thermal accelerometers and fluid gyroscopes, which have now been developed …
From sensor networks to internet of things. Bluetooth low energy, a standard for this evolution
Current sensor networks need to be improved and updated to satisfy new essential
requirements of the Internet of Things, where cutting-edge applications will appear. These …
requirements of the Internet of Things, where cutting-edge applications will appear. These …
Theoretical modeling, numerical simulations and experimental study of micro thermal convective accelerometers
We present a one-dimensional (1D) theoretical model for the design analysis of a micro
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …
Enhanced 3-axis sensitivity of a CMOS MEMS convective accelerometer using a new power efficient heater structure
In this paper, a new 3-axis micromachined convective accelerometer is designed using
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …
Theoretical and experimental study and compensation for temperature drifts of micro thermal convective accelerometer
We present an ambient temperature compensation method for micro thermal convective
accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) …
accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) …
Tri-axis convective accelerometer with closed-loop heat source
In this paper, we report the details and findings of a study on tri-axis convective
accelerometer, which is designed with the closed-loop type heat source and thermal …
accelerometer, which is designed with the closed-loop type heat source and thermal …
Sensitivity and frequency response improvement of the micro thermal convective accelerometer with structure optimization
We present a theoretical model for transient analysis of the micro thermal convective
accelerometer (MTCA). By leveraging this model, efficient parametric prediction can be …
accelerometer (MTCA). By leveraging this model, efficient parametric prediction can be …
Design and analysis of CMOS MEMS based single proof mass Tri-axial capacitive accelerometer with readout integrated circuit
In this paper, a Monolithic CMOS-MEMS (MicroElectroMechanical Systems) based Tri-axis
Accelerometer with complete Readout Integrated Circuit (ROIC) implemented using 150nm …
Accelerometer with complete Readout Integrated Circuit (ROIC) implemented using 150nm …
Fabrication and characterization of polymeric three-axis thermal accelerometers
The concept, fabrication process, and characterization of a three-axis thermal accelerometer
are presented in this paper. A combination of microelectromechanical systems (MEMS) …
are presented in this paper. A combination of microelectromechanical systems (MEMS) …