Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains

RC Germanicus, E Picard, B Domenges, K Danilo… - Applied surface …, 2007 - Elsevier
In this work, we demonstrate that atomic force microscopy allows topography measurement
as well as the local electrical properties of very high-doped polysilicon film prior to any …

Thermal-induced normal grain growth mechanism in LPCVD polysilicon film

J Akhtar, SK Lamichhane, P Sen - Materials Science in Semiconductor …, 2005 - Elsevier
Normal grain growth mechanism due to high-temperature annealing of the polysilicon film
has been shown experimentally while observing the limiting grain size to the order of the …

Impact of Carbon Do** on Polysilicon Grain Size Distribution and Yield Enhancement for 40-nm Embedded Nonvolatile Memory Technology

L Luo, K Shubhakar, S Mei, N Raghavan… - … on Device and …, 2018 - ieeexplore.ieee.org
Polysilicon (poly-Si) grain size control is a critical issue with scaling of MOS transistors in
integrated-circuit design, more so in embedded nonvolatile memory (NVM) technology. This …

MATLAB based image analysis software for characterization of microstructure materials

A Hussain, AM Muad, I Ahmad… - … for the E-Age (IEEE Cat …, 2002 - ieeexplore.ieee.org
This paper presents MATLAB based image analysis software specially developed to perform
characteristic analysis of microstructures images such as the Atomic Force Microscopy …

Thermal Induced Structural Conductivity in LPCVD Polysilicon Film on Silicon Nitride/SiO2 Capped (100) Silicon

SK Lamichhane, J Akhtar - Nepal Journal of Science and Technology, 2009 - nepjol.info
Polysilicon (PS) grains are clustered in an order in the presence of thermal do** of boron
in low pressure chemical vapour deposition (LPCVD). PS layer is lying on silicon …

Device Characterization of 0.21 μm CMOS Device

LT Foo, I Ahmad, MS Sulong - Journal of Science and …, 2009 - penerbit.uthm.edu.my
The objective of this study was ot measure the electrical characteristics, observe the
structure and characterize the material of 0.21 μm CMOS devices. The material …