Role of oxygen vacancies in ferroelectric or resistive switching hafnium oxide

J Lee, K Yang, JY Kwon, JE Kim, DI Han, DH Lee… - Nano …, 2023 - Springer
HfO2 shows promise for emerging ferroelectric and resistive switching (RS) memory devices
owing to its excellent electrical properties and compatibility with complementary metal oxide …

Many routes to ferroelectric HfO2: A review of current deposition methods

HA Hsain, Y Lee, M Materano, T Mittmann… - Journal of Vacuum …, 2022 - pubs.aip.org
Although 10 years have passed since the initial report of ferroelectricity in hafnia (HfO 2),
researchers are still intensely fascinated by this material system and the promise it holds for …

Interplay between oxygen defects and dopants: effect on structure and performance of HfO 2-based ferroelectrics

M Materano, PD Lomenzo, A Kersch… - Inorganic Chemistry …, 2021 - pubs.rsc.org
Ten years after the first report on ferroelectricity in HfO2, researchers are still occupied
unraveling the different causes behind this phenomenon. Among them, oxygen related …

Retention Improvement of HZO-Based Ferroelectric Capacitors with TiO2 Insets

AA Koroleva, AG Chernikova, SS Zarubin… - ACS …, 2022 - ACS Publications
The influence of the bottom TiO2 interfacial layer grown by atomic layer deposition on the
ferroelectric properties of the TiN/Hf0. 5Zr0. 5O2/TiN capacitors is systematically …

High-endurance ferroelectric (La, Y) and (La, Gd) Co-doped hafnium zirconate grown by atomic layer deposition

MI Popovici, AM Walke, J Bizindavyi… - ACS Applied …, 2022 - ACS Publications
Thin films based on stoichiometric hafnium zirconate doped and co-doped with La, Gd,
and/or Y have been grown by atomic layer deposition on TiN electrodes. The resulting TiN …

Ferroelectricity of hafnium oxide-based materials: Current status and future prospects from physical mechanisms to device applications

W Yang, C Yu, H Li, M Fan, X Song, H Ma… - Journal of …, 2023 - iopscience.iop.org
The finding of the robust ferroelectricity in HfO 2-based thin films is fantastic from the view
point of both the fundamentals and the applications. In this review article, the current …

Overcoming size effects in ferroelectric thin films

SH Park, JY Kim, JY Song… - Advanced Physics …, 2023 - Wiley Online Library
Ferroelectric thin films have recently received unprecedented attention due to the need to
miniaturize electronic circuit devices. Synthesis and deposition processes along with …

Role of oxygen source on buried interfaces in atomic-layer-deposited ferroelectric hafnia–zirconia thin films

HA Hsain, Y Lee, S Lancaster… - … Applied Materials & …, 2022 - ACS Publications
Hafnia–zirconia (HfO2–ZrO2) solid solution thin films have emerged as viable candidates for
electronic applications due to their compatibility with Si technology and demonstrated …

Reliability Improvement from La2O3 Interfaces in Hf0.5Zr0.5O2‐Based Ferroelectric Capacitors

F Mehmood, R Alcala, P Vishnumurthy… - Advanced Materials …, 2023 - Wiley Online Library
Further optimization of a typically reported ferroelectric capacitor comprised of a Hf0. 5Zr0.
5O2 ferroelectric thin film with TiN electrodes is explored by introducing an additional non …

Reduced fatigue and leakage of ferroelectric TiN/Hf0. 5Zr0. 5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface

HA Hsain, Y Lee, S Lancaster, PD Lomenzo… - …, 2023 - iopscience.iop.org
Abstract Hf 0.5 Zr 0.5 O 2 (HZO) thin films are promising candidates for non-volatile memory
and other related applications due to their demonstrated ferroelectricity at the nanoscale and …