Advanced technologies for the calibration of machine tools are presented. Kinematic errors
independently of their causes are classified into errors within one-axis as intra-axis errors …

Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

On-machine and in-process surface metrology are important for quality control in
manufacturing of precision surfaces. The classifications, requirements and tasks of on …

This paper describes the fabrication of a large area sinusoidal grid surface, which is used as
the measurement reference of a surface encoder for multi-axis position measurement. The …

This paper describes a surface motor-driven XY planar motion stage equipped with a newly
developed XYθZ surface encoder for sub-micron positioning. The surface motor consists of …

In dimensional metrology it is necessary to carry out multi-axis angle and displacement
measurement for high-precision positioning. Although the state-of-the-art linear …

A mode-locked laser autocollimator, in which a group of first-order diffracted beams from a
grating reflector are detected by an autocollimation unit, has an expanded angle …

A mode-locked femtosecond laser, which is often referred to as the optical frequency comb,
has increasing applications in various industrial fields, including production engineering, in …

A novel method for simultaneously measuring six degree-of-freedom (6DOF) geometric
motion errors is proposed in this paper, and the corresponding measurement instrument is …

This paper provides an overview of state-of-the-art sensing and machine learning
technologies for intelligent measurement in smart and precision manufacturing. Length …