We examine the effects of the substrate on the determination of mechanical properties of thin
films by nanoindentation. The properties of aluminum and tungsten films on the following …

This article provides a practical reference guide for instrumented indentation testing (IIT). It
summarizes the various types of indenters used in IIT and parameters describing their …

Mechanical characterization of atomic layer deposited (ALD) alumina (Al2O3) for use in
micro-and nano-electromechanical systems has been performed using several …

In order to further investigate nanoindentation data of film–substrate systems and to learn
more about the mechanical properties of nanometer film–substrate systems, two kinds of …

A new type of nanoindentation experiment showing the effect of a strain gradient on the flow
strength of a crystalline material is conducted and analyzed. We show that by indenting a …

We present an analysis of the mechanical properties of transparent conducting oxide (TCO),
indium tin oxide (ITO) and indium zinc oxide (IZO) thin films on the glass substrates. The thin …

We have studied the indentation properties of sputter deposited W thin films on single crystal
sapphire substrates in an effort to understand the effects of pile-up on the indentation …

The indentation experiment is a popular method for the investigation of mechanical
properties of thin films. By application of conventional methods, the hardness and the …

Making a clear distinction is made between nano-and micro-mechanical testing for physical
reasons, this monograph describes the basics and applications of the supermicroscopies …

Interdigitated humidity sensors with atomic layer deposited (ALD) coatings of aluminum
oxide demonstrated no leakage current relative to uncoated sensors stored in the ambient …