Modeling and control of piezo-actuated nanopositioning stages: A survey
Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …
applications due to the excellent advantages of the fast response time, large mechanical …
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
A large-stroke reluctance-actuated nanopositioner: compliant compensator for enhanced linearity and precision motion control
Hybrid reluctance actuators, known for their remarkable motor constant and bidirectional
noncontact force, emerge as superior alternatives to piezoelectric stack or voice coil …
noncontact force, emerge as superior alternatives to piezoelectric stack or voice coil …
Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner
BJ Kenton, KK Leang - IEEE/ASME Transactions on …, 2011 - ieeexplore.ieee.org
The development of a high-performance three-axis serial-kinematic nanopositioning stage is
presented. The stage is designed for high-bandwidth applications that include video-rate …
presented. The stage is designed for high-bandwidth applications that include video-rate …
Analysis and comparison of three discrete-time feedforward model-inverse control techniques for nonminimum-phase systems
Noncollocated sensors and actuators, and/or fast sample rates with plants having high
relative degree, can lead to nonminimum-phase (NMP) discrete-time zero dynamics that …
relative degree, can lead to nonminimum-phase (NMP) discrete-time zero dynamics that …
Controlling soft robots: balancing feedback and feedforward elements
Soft robots (SRs) represent one of the most significant recent evolutions in robotics.
Designed to embody safe and natural behaviors, they rely on compliant physical structures …
Designed to embody safe and natural behaviors, they rely on compliant physical structures …
Piezo-actuated smart mechatronic systems: Nonlinear modeling, identification, and control
Z Yuan, S Zhou, Z Zhang, Z **ao, C Hong… - … Systems and Signal …, 2024 - Elsevier
Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …
Precision motion control of piezoelectric nanopositioning stage with chattering-free adaptive sliding mode control
Q Xu - IEEE Transactions on Automation Science and …, 2016 - ieeexplore.ieee.org
This paper presents the precision motion control of a piezoelectric nanopositioning stage
using a new scheme of adaptive sliding mode control with uncertainty and disturbance …
using a new scheme of adaptive sliding mode control with uncertainty and disturbance …
Design and control of a novel compliant constant-force gripper based on buckled fixed-guided beams
Y Liu, Y Zhang, Q Xu - IEEE/ASME Transactions on …, 2016 - ieeexplore.ieee.org
This paper presents the design and control of a novel gripper device with a passive type of
compliant constant-force mechanism. The function of constant-force output is achieved by …
compliant constant-force mechanism. The function of constant-force output is achieved by …
Adaptive integral terminal third-order finite-time sliding-mode strategy for robust nanopositioning control
Q Xu - IEEE Transactions on Industrial Electronics, 2020 - ieeexplore.ieee.org
This article proposes a novel adaptive integral terminal third-order finite-time sliding-mode
control strategy dedicated to motion tracking control of a piezoelectric-driven …
control strategy dedicated to motion tracking control of a piezoelectric-driven …