Modeling and control of piezo-actuated nanopositioning stages: A survey

GY Gu, LM Zhu, CY Su, H Ding… - IEEE Transactions on …, 2014 - ieeexplore.ieee.org
Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012 - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

A large-stroke reluctance-actuated nanopositioner: compliant compensator for enhanced linearity and precision motion control

X Li, Y Liu, L Ge, Z Zhang - IEEE/ASME Transactions on …, 2024 - ieeexplore.ieee.org
Hybrid reluctance actuators, known for their remarkable motor constant and bidirectional
noncontact force, emerge as superior alternatives to piezoelectric stack or voice coil …

Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner

BJ Kenton, KK Leang - IEEE/ASME Transactions on …, 2011 - ieeexplore.ieee.org
The development of a high-performance three-axis serial-kinematic nanopositioning stage is
presented. The stage is designed for high-bandwidth applications that include video-rate …

Analysis and comparison of three discrete-time feedforward model-inverse control techniques for nonminimum-phase systems

JA Butterworth, LY Pao, DY Abramovitch - Mechatronics, 2012 - Elsevier
Noncollocated sensors and actuators, and/or fast sample rates with plants having high
relative degree, can lead to nonminimum-phase (NMP) discrete-time zero dynamics that …

Controlling soft robots: balancing feedback and feedforward elements

C Della Santina, M Bianchi, G Grioli… - IEEE Robotics & …, 2017 - ieeexplore.ieee.org
Soft robots (SRs) represent one of the most significant recent evolutions in robotics.
Designed to embody safe and natural behaviors, they rely on compliant physical structures …

Piezo-actuated smart mechatronic systems: Nonlinear modeling, identification, and control

Z Yuan, S Zhou, Z Zhang, Z **ao, C Hong… - … Systems and Signal …, 2024 - Elsevier
Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …

Precision motion control of piezoelectric nanopositioning stage with chattering-free adaptive sliding mode control

Q Xu - IEEE Transactions on Automation Science and …, 2016 - ieeexplore.ieee.org
This paper presents the precision motion control of a piezoelectric nanopositioning stage
using a new scheme of adaptive sliding mode control with uncertainty and disturbance …

Design and control of a novel compliant constant-force gripper based on buckled fixed-guided beams

Y Liu, Y Zhang, Q Xu - IEEE/ASME Transactions on …, 2016 - ieeexplore.ieee.org
This paper presents the design and control of a novel gripper device with a passive type of
compliant constant-force mechanism. The function of constant-force output is achieved by …

Adaptive integral terminal third-order finite-time sliding-mode strategy for robust nanopositioning control

Q Xu - IEEE Transactions on Industrial Electronics, 2020 - ieeexplore.ieee.org
This article proposes a novel adaptive integral terminal third-order finite-time sliding-mode
control strategy dedicated to motion tracking control of a piezoelectric-driven …