In the last few years,“Run-to-Run”(R2R) control techniques have been developed and used
to control various semiconductor manufacturing processes. These techniques combine …

The use of statistical techniques to build approximations of expensive computer analysis
codes pervades much of today's engineering design. These statistical approximations, or …

Desirability functions have been used extensively to simultaneously optimize several
responses. Since the original formulation of these functions contains non-differentiable …

Increased pressure on upstream processes to maximize productivity has been crowned with
great success, although at the cost of shifting the bottleneck to purification. As drivers were …

Perhaps the most prevalent use of statistics in engineering design is through Taguchi's
parameter and robust design—using orthogonal arrays to compute signal-to-noise ratios in …

This paper presents a new run-to-run (R2R) multiple-input-multiple-output controller for
semiconductor manufacturing processes. The controller, termed optimizing adaptive quality …

In this paper, a technology computer-aided design (TCAD) driven method for accurate
prediction of the performance spread of integrated circuits due to process variations is …

Purpose–The purpose of this paper is to introduce a method of the bottleneck detection for
Emergency Department (ED) improvement using benchmarking and design of experiments …

A system and method for design of experiments (DOE) using direct surface manipulation of a
mesh model. The method includes the steps of selecting a geometric model in a computer …

The aim of this study was to achieve high-level production of the human growth hormone
(hGH) in the prokaryotic expression system. In this regard, we performed cloning …