In this article, we present synthesis of an ion beam column as a single entity, based on
combined focusing and deflection (CFD). We present seven cases as examples of designing …

A thorough investigation of a class of axially symmetric three-electrode einzel lenses is
given. The study is based on the analysis of axial potential distributions. Two different …

Optimization of electrostatic lenses was successfully achieved by using the cubic spline
method or the a priori given multielectrode approach. In this article we propose optimization …

Synthesis of electrostatic deflectors with given source parameters, first‐order properties, and
minimum aberrations can be realized by using the cubic spline method or the a priori given …

An analytical model in the form of a hyperbolic function has been suggested for the axial
potential distribution of an electrostatic einzel lens. With the aid of this hyperbolic model the …

Electrostatic lenses are used extensively to control charged-particle beams. In a particular
application to ion beam lithography for microelectronics fabrication, it was necessary to …

Synthesis of electrostatic lenses was successfully achieved by using the cubic spline
method or the a priori given multielectrode approach. In this dissertation, we propose …