Most of the variables measured in scientific investigations or engineering applications
depend, by varying degrees, on temperature. This necessitates the simultaneous …

The complementary metal oxide semiconductor (CMOS) microbolometer technology
provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The …

A focal-plane array (FPA) for room-temperature detection of 0.65-THz radiation has been
fully integrated in a low-cost 0.25 mum CMOS process technology. The circuit architecture is …

The booming growth in environmental conditions sensing and monitoring pushes the need
of inexpensive environment sensors with small size and low power consumption. The …

Infrared (IR) radiation detectors are used in numerous applications from thermal imaging to
spectroscopic gas sensing. Obtaining high speed and sensitivity, low-power operation, and …

This study presents the micro thermoelectric infrared (IR) sensor consisting of the heat
transduction absorber and the serpentine structure with embedded thermocouple using the …

A 600-GHz single-chip focal-plane array (FPA) has been fully integrated in a 0.25-mum
CMOS process technology. The 3times5 array achieves a room temperature responsivity of …

The metal-type microbolometers in CMOS technology normally suffer low resistivity and high
thermal conductivity, limiting their performance and application areas. In this paper, we …

An uncooled detector has reached the thermodynamic temperature fluctuation limit, such
that 98% of its total noise consisted of phonon and photon fluctuations of the detector body …

This paper reports the design, fabrication technology, post-CMOS micromachining and
characterization of CMOS-silicon-on-insulator (SOI)-microelectromechanical system (MEMS) …