Multi-gate device and method of fabrication thereof

KC Ching, CC Wu, CF Huang, WH Hsieh… - US Patent …, 2020‏ - Google Patents
(57) ABSTRACT A semiconductor includes a first transistor and a second transistor. The first
transistor includes a first and a second epitaxial layer, formed of a first semiconductor …

Method of manufacturing a semiconductor device and a semiconductor device

SM Yu, TY Lee, WS Yun, FH Yang - US Patent 10,497,624, 2019‏ - Google Patents
Amethod of manufacturing a semiconductor device includes forming a first semiconductor
layer having a first composi tion over a semiconductor substrate, and forming a second …

Semiconductor device and method of manufacturing the same

CC Cheng, YL Yang, WS Yun, CF Hsu… - US Patent …, 2019‏ - Google Patents
(57) ABSTRACT A semiconductor device and a method of manufacturing the same are
disclosed. The semiconductor device includes semiconductor wires disposed over a …

Method of manufacturing a semiconductor device and a semiconductor device

CC Cheng, CF Hsu, C Tzu-Chiang, TY Lee… - US Patent …, 2020‏ - Google Patents
In a method of manufacturing a semiconductor device, a fin structure, in which first
semiconductor layers and second semiconductor layers are alternately stacked, is formed. A …

Semiconductor device having a varying thickness nanowire channel and method for fabricating the same

SH Lee, DW Kim, DC Suh, SJ Kim - US Patent 10,319,863, 2019‏ - Google Patents
(57) ABSTRACT A semiconductor device includes a drain, a source, a gate electrode, and a
nanowire between the source and drain. The nanowire has a first section with a first …

Method of manufacturing a semiconductor device and a semiconductor device

HL Chiang, IS Chen, C Tzu-Chiang - US Patent 10,872,825, 2020‏ - Google Patents
(57) ABSTRACT A semiconductor device includes a first plurality of stacked nanowire
structures extending in a first direction disposed over a first region of a semiconductor …

Semiconductor device and manufacturing method thereof

IH Wong, SC Pan, CW Liu, LAN Huang-Siang… - US Patent …, 2019‏ - Google Patents
A method of manufacturing a semiconductor device includes forming a fin structure having a
stack of alternating first semiconductor layers and second semiconductor layers on a …

Method of forming internal dielectric spacers for horizontal nanosheet FET architectures

WE Wang, MS Rodder, BJ Obradovic, DR Palle… - US Patent …, 2018‏ - Google Patents
(57) ABSTRACT A method to form a nanosheet stack for a semiconductor device includes
forming a stack of a plurality of sacrificial layers and at least one channel layer on an …

Nanowire stack GAA device with inner spacer and methods for producing the same

IS Chen, CC Cheng, C Tzu-Chiang… - US Patent 10,651,314, 2020‏ - Google Patents
Ananowire FET device includes a vertical stack ofnanowire strips configured as the
semiconductor body. One or more of the top nanowire strips are receded and are shorter …

Method of manufacturing a semiconductor device and a semiconductor device

KC Chiang, CF Hsu, CC Cheng, C Tzu-Chiang… - US Patent …, 2020‏ - Google Patents
In a method of manufacturing a semiconductor device, a fin structure, in which first
semiconductor layers and second semiconductor layers are alternately stacked, is formed. A …