Modern electronics testing has a legacy of more than 40 years. The introduction of new
technologies, especially nanometer technologies with 90nm or smaller geometry, has …

A major task for the implementation of Built-In-Self-Test (BIST) strategies for MEMS is the
generation of the test stimuli. These devices can work in different energy domains and are …

In 1824 Carnot established that the efficiency of cyclic engines operating between a hot bath
at absolute temperature T hot and a bath at a lower temperature T cold cannot exceed 1− T …

As predicted by technology roadmaps, embedded micro-electro-mechanical-systems
(MEMS) is yet another step in the continuous search for higher levels of integration and …

A major problem for applying self-test techniques to MEMS is the multi-domain nature of the
sensing parts that require special test equipment for stimuli generation. In this work we …

The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency
of a surface-micromachined resonator and accelerometer are presented. For each device, it …

Developments in electronic/fluidic microsystems are progressing rapidly. The ultimate goal
is to deliver products in the 10,000 fluidic reaction-wells range. Exciting applications include …

As stable fabrication processes for MicroElectroMechanical Systems (MEMS) emerge,
research efforts shift towards the design of systems of increasing complexity. The ways in …

In this paper, Oscillation-based Test Methodology (OTM) is evaluated in the context of
MEMS testing. Both qualitative and quantitative evaluations of fault coverage are discussed …

High-reliability and safety-critical markets for microelectromechanical systems are driving
new proposals for the integration of efficient built-in test and monitoring functions. The …