Fed-SEMI: A Federated Machine Learning Framework for Nano-Scale Defect Classification and Detection in Semiconductor Manufacturing with Decentralized and …

B Dey, J Deforce, V Blanco, S Halder… - 2024 International …, 2024 - ieeexplore.ieee.org
In this research, we introduce a decentralized Federated Learning (FL) framework, as Fed-
SEMI, which utilizes the YOLOv8 object detection model to facilitate advanced node …