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CMOS compatible pyroelectric materials for infrared detectors
The pyroelectric materials offer good performance at room temperature because of their high
sensitivity and uniform spectral response in the wide infrared (IR) range. Out of various types …
sensitivity and uniform spectral response in the wide infrared (IR) range. Out of various types …
[HTML][HTML] A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride
In this paper, we fabricate and demonstrate a functional complementary metal-oxide-
semiconductor (CMOS) compatible pyroelectric uncooled thermal detector using 12% doped …
semiconductor (CMOS) compatible pyroelectric uncooled thermal detector using 12% doped …
Considerations for an 8-inch wafer-level CMOS compatible AlN pyroelectric 5–14 μm wavelength IR detector towards miniature integrated photonics gas sensors
CMOS compatibility and 8-inch manufacturability have been highly desired in MEMS
technology. In this article, we demonstrate a MEMS pyroelectric IR detector using CMOS …
technology. In this article, we demonstrate a MEMS pyroelectric IR detector using CMOS …
CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN
We present the optical and electrical properties of AlN-based and 12% doped ScAlN-based
pyroelectric detectors fabricated on 8-inch wafers respectively. Both AlN and ScAlN …
pyroelectric detectors fabricated on 8-inch wafers respectively. Both AlN and ScAlN …
Mixed oxide provides an efficient solution to near infrared detection
A Cheneau, AF Dégardin… - Electro-Optical and …, 2023 - spiedigitallibrary.org
With the objective of producing high-performance infrared radiation detectors, we have
undertaken the study of devices based on the Y-Ba-Cu-O material produced in amorphous …
undertaken the study of devices based on the Y-Ba-Cu-O material produced in amorphous …