CMOS compatible pyroelectric materials for infrared detectors

B Uthra, R Sinha, PB Agarwal - Materials Science in Semiconductor …, 2022 - Elsevier
The pyroelectric materials offer good performance at room temperature because of their high
sensitivity and uniform spectral response in the wide infrared (IR) range. Out of various types …

[HTML][HTML] A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride

DKT Ng, T Zhang, LY Siow, L Xu, CP Ho, H Cai… - Applied Physics …, 2020 - pubs.aip.org
In this paper, we fabricate and demonstrate a functional complementary metal-oxide-
semiconductor (CMOS) compatible pyroelectric uncooled thermal detector using 12% doped …

CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

DKT Ng, CP Ho, T Zhang, L Xu, LY Siow… - MOEMS and …, 2021 - spiedigitallibrary.org
We present the optical and electrical properties of AlN-based and 12% doped ScAlN-based
pyroelectric detectors fabricated on 8-inch wafers respectively. Both AlN and ScAlN …

Mixed oxide provides an efficient solution to near infrared detection

A Cheneau, AF Dégardin… - Electro-Optical and …, 2023 - spiedigitallibrary.org
With the objective of producing high-performance infrared radiation detectors, we have
undertaken the study of devices based on the Y-Ba-Cu-O material produced in amorphous …