The review will describe the various scanning probe microscopy tips and cantilevers used
today for scanning force microscopy and magnetic force microscopy. Work undertaken to …

Scanning probe microscopes, in particular the atomic force microscope (AFM), have
developed into sophisticated instruments that, throughout the world, are no longer used just …

Accurate and traceable calibration of lateral standards (1D and 2D gratings) is a basic
metrological task for nano-and microtechnology. Both the mean pitch and the uniformity of …

This paper presents the state of the art in scanning force microscopy for dimensional
metrology. A detailed description is given of the important factors affecting the major …

An approach to establishing rigorous nano-and microdimensional metrology using scanning
probe microscopes (SPMs) and metrological profilometers is presented. An overview on …

Abstract International comparisons between National Metrology Institutes are important to
verify measurement results and the associated uncertainties. In this paper, we report a …

An international comparison of optical instruments measuring polymer surfaces with
arithmetic mean height values in the sub-micrometre range has been carried out. The …

Scanning probe microscope (SPM) dimensional metrology efforts at the US National Institute
of Standards and Technology (NIST) are reviewed in this paper. The main SPM instruments …

Abstract Two-dimensional (2D) gratings are widely used for calibrating the xy-plane of
nearly all kinds of microscopes. The mean pitch, orthogonality and local pitch uniformity of …

The calibration of areal surface topography measuring instruments is a topic that is currently
under discussion in international standard committees and a specification standard that …