Micro-and Nano-Electro-Mechanical Systems (MEMS and NEMS) represent existing
(MEMS) and emerging (NEMS) technologies based on microfabrication of micron to …

The study of processes concerning adsorption, diffusion and reaction of atoms and
molecules on surfaces is one of the core areas of surface science research. Resolving these …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Single-molecule measurement techniques have illuminated unprecedented details of
chemical behavior, including observations of the motion of a single molecule on a surface …

Scanning probe microscopes, in particular the atomic force microscope (AFM), have
developed into sophisticated instruments that, throughout the world, are no longer used just …

Atomic force microscopy allows visualization of biomolecules with nanometer resolution
under physiological conditions. Recent advances have improved the time resolution of the …

Quality control and defect monitoring are of great importance to the semiconductor industry.
This article presents a system to enable inspection of nanoscale features in-line with …

We present an atomic force microscope (AFM) head for optical beam deflection on small
cantilevers. Our AFM head is designed to be small in size, easily integrated into a …

Time resolution is one of the most severe limitations of scanning probe microscopies
(SPMs), since the typical image acquisition times are in the order of several seconds or even …

We present the design and the performance of the FAST (Fast Acquisition of SPM
Timeseries) module, an add-on instrument that can drive commercial scanning probe …