Self-organized nanopatterning of silicon surfaces by ion beam sputtering

J Munoz-Garcia, L Vazquez, M Castro, R Gago… - Materials Science and …, 2014 - Elsevier
Abstract In recent years Ion Beam Sputtering (IBS) has revealed itself as a powerful
technique to induce surface nanopatterns with a large number of potential applications …

[HTML][HTML] A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation

R Cuerno, JS Kim - Journal of Applied Physics, 2020 - pubs.aip.org
The formation of periodic patterns on the surfaces of many solid materials undergoing ion-
beam irradiation has long been known. The advent of high resolution characterization …

Coupling of morphology to surface transport in ion-beam irradiated surfaces: Oblique incidence

J Muñoz-García, R Cuerno, M Castro - Physical Review B—Condensed Matter …, 2008 - APS
We propose and study a continuum model for the dynamics of amorphizable surfaces
undergoing ion-beam sputtering (IBS) at intermediate energies and oblique incidence. After …

Self-organized surface nanopatterning by ion beam sputtering

J Muñoz-García, L Vázquez, R Cuerno… - Toward Functional …, 2009 - Springer
The production of self-organized surface nanopatterns by ion beam sputtering (IBS) at low (<
10 keV) and intermediate (10–100 keV) energies has emerged in the last decade as a …

Controlling the physics and chemistry of binary and ternary praseodymium and cerium oxide systems

G Niu, MH Zoellner, T Schroeder, A Schaefer… - Physical Chemistry …, 2015 - pubs.rsc.org
Rare earth praseodymium and cerium oxides have attracted intense research interest in the
last few decades, due to their intriguing chemical and physical characteristics. An …

Nanoscale pattern formation at surfaces under ion-beam sputtering: A perspective from continuum models

R Cuerno, M Castro, J Muñoz-García, R Gago… - Nuclear Instruments and …, 2011 - Elsevier
Although reports on surface nanostructuring of solid targets by low to medium energy ion
irradiation date back to the 1960s, only with the advent of high resolution tools for …

Strong anisotropy in surface kinetic roughening: Analysis and experiments

E Vivo, M Nicoli, M Engler, T Michely, L Vázquez… - Physical Review B …, 2012 - APS
We report an experimental assessment of surface kinetic roughening properties that are
anisotropic in space. Working for two specific instances of silicon surfaces irradiated by ion …

Effect of UHV annealing on morphology and roughness of sputtered Si (1 1 1)-(7× 7) surfaces

JC Mahato, A Roy, R Batabyal, D Das, R Gorain… - Journal of Crystal …, 2025 - Elsevier
Ar+ ion has been used regularly for the cleaning of semiconductor, metal surfaces for
epitaxial nanostructures growth. We have investigated the effect of low-energy Ar+ ion …

Evolution of pattern formation under ion bombardment of substrate

NA Kudryashov, PN Ryabov, TE Fedyanin, AA Kutukov - Physics Letters A, 2013 - Elsevier
Processes of self-organization described by a nonlinear evolution equation of sixth order are
considered on substrate surfaces after ion beam bombardment. Five families of exact …

Independence of interrupted coarsening on initial system order: ion-beam nanopatterning of amorphous versus crystalline silicon targets

J Muñoz-García, R Gago, R Cuerno… - Journal of Physics …, 2012 - iopscience.iop.org
Interrupted coarsening (IC) has recently been identified as an important feature for the
dynamics of the typical length-scale in pattern-forming systems on surfaces. In practice, it …