Field emission (FE) is based on the physical phenomenon of quantum tunneling, in which
electrons are injected from the surface of materials into vacuum under the influence of an …

Expectations of a technological revolution are associated with nanotechnology, and indeed
the generation, modification and utilization of objects with tiniest dimensions already …

The performance of high-speed semiconductor devices—the genius driving digital
computers, advanced electronic systems for digital signal processing, telecommunication …

The construction of three-dimensional (3D) objects, with any desired surface patterns, is
both critical to and easily achieved in macroscale science and engineering. However, on the …

Metal features with 1O-nm linewidths were produced on thick GaAs substrates using
electron beam lithography. A single layer of poly methyl methacrylate (PMMA) was exposed …

We report the fabrication of 3 nm NiCr wires on a solid silicon substrate. The process uses
conventional 100 keV electron beam lithography and poly (methyl methacrylate) resist. The …

New developers for poly (methyl methacrylate) consisting of mixtures of common develo**
components have been carefully investigated. It has been found that adding a small …

This revised and expanded edition of the first comprehensive introduction to the rapidly-
evolving field of spintronics covers ferromagnetism in nano-electrodes, spin injection, spin …

Polymers in electron beam and X-Ray lithography - ScienceDirect Skip to main contentSkip to
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Electron beam spot diameters can be estimated either by resolution tests or by scanning the
beam over a sharp edge and detecting the transmitted (or reflected) current. The sharp edge …