[BUKU][B] Metrology and Diagnostic Techniques for Nanoelectronics

Z Ma, DG Seiler - 2017 - taylorfrancis.com
Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

Odyssey of the charge pum** technique and its applications from micrometric-to atomic-scale era

B Djezzar - Journal of Applied Physics, 2023 - pubs.aip.org
This paper reviews the evolution of the charge pum** (CP) technique and its applications
from the micrometer-scale to the atomic-scale device era. We describe the more significant …

Single vacancy defect spectroscopy on HfO2 using random telegraph noise signals from scanning tunneling microscopy

R Thamankar, N Raghavan, J Molina… - Journal of Applied …, 2016 - pubs.aip.org
Random telegraph noise (RTN) measurements are typically carried out at the device level
using standard probe station based electrical characterization setup, where the measured …

Analysis of charge-pum** data for identification of dielectric defects

D Veksler, G Bersuker, A Koudymov… - IEEE transactions on …, 2013 - ieeexplore.ieee.org
We introduce a data analysis methodology for multifrequency charge-pum** (CP)
measurements, which allows extracting both spatial and energy profiles of the CP-active …

CAFM based spectroscopy of stress-induced defects in HfO2 with experimental evidence of the clustering model and metastable vacancy defect state

A Ranjan, N Raghavan, K Shubhakar… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
In this study, we perform random telegraph noise (RTN) spectroscopy on ultra-thin HfÜ2
dielectric films using a conductive atomic force microscope (CAFM), enabling accurate …

On the permanent component profiling of the negative bias temperature instability in p-MOSFET devices

B Djezzar, H Tahi, A Benabdelmoumene… - Solid-State …, 2015 - Elsevier
In this manuscript, we have investigated the negative bias temperature instability (NBTI)
induced border-trap (N bt) depth in the interfacial oxide region of PMOS transistors using …

Frequency dependent charge pum**—A defect depth profiling tool?

JT Ryan, RG Southwick, JP Campbell… - 2012 IEEE …, 2012 - ieeexplore.ieee.org
We investigate the validity of using frequency-dependent charge pum** (FD-CP) to
determine bulk defect depth distributions. Using simple physical arguments we conclude …

Multi-technique study of defect generation in high-k gate stacks

D Veksler, G Bersuker, H Madan… - 2012 IEEE …, 2012 - ieeexplore.ieee.org
A set of measurement techniques-SILC, low frequency noise, and pulse CV-combined with
the physical descriptions of the processes associated with these measurements were …

Optimisation multi-objectif par algorithmes génétiques et approche pareto des paramètres d'usinage sous contraintes des limitations de production

B Merdjaoui - 2006 - ccdz.cerist.dz
Résumé L'optimisation des conditions de coupe en fabrication sérielle de produits
industriels par enlèvement de matière est une étape indispensable dans le cadre de …

On the contribution of bulk defects on charge pum** current

JT Ryan, RG Southwick, JP Campbell… - IEEE transactions on …, 2012 - ieeexplore.ieee.org
Frequency-dependent charge pum** (CP)(FD-CP) has emerged as a popular technique
for studying the spatial and energetic distribution of defect centers in advanced high-k gate …