Dynamic behaviour of oscillating perforated plates for MEMS applications under the effect of
squeeze film dam** is studied. Two geometrical topology types of gold and silicon plates …

This paper presents microfabrication process-driven design of a multi-degree of freedom
(multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope …

In this work the response of a commercial polysilicon MEMS accelerometer subject to
shocks in the range 90–5500 g (g being the gravity acceleration) is studied. In situ …

Squeezed air film between two closely spaced vibrating microstructures is the important
source of energy dissipation and has profound effects on the dynamics of …

Squeeze air film dam** is introduced in microelectromechanical systems due to the
motion of the fluid between two closely spaced oscillating micro-structures. The literature is …

Predicting squeeze-film dam** due to the air gap between the vibrating microstructure
and a fixed substrate is crucial in the design of microelectromechanical system (MEMS). The …

Three different numerical strategies are presented for the estimation of the dam** force
acting on perforated movable MEMS dampers. Results from the 2D Perforated Profile …

Squeeze-film dam** plays a significant role in the performance of micro-resonators
because it determines their quality factors. Perforations in microstructures are often used to …

MEMS capacitive accelerometers are ubiquitously used in wide-ranging applications.
Different applications require a trade-off between design parameters to realize either high …

The trapped air between two closely oscillating MEMS devices introduces significant
dam** in the system. These dam** effects can be modeled by designing a suitable …