Photons have many advantages for vaporizing condensed systems, and laser vaporization
sources have a flexibility not available with other methods. These sources are applied to …

Laser Processing and Chemistry gives an overview of the fundamentals and applications of
laser-matter interactions, in particular with regard to laser material processing. Special …

AlN thin films were grown at 200–450° C on Si substrates by laser ablation of Al targets in
nitrogen-reactive atmosphere using a robust and simple experimental set-up based on a Nd …

We report on a study of the compositional and chemical properties of films deposited on
silicon by quadrupoled Nd: YAG pulsed laser ablation of a ceramic AlN target. The ablation …

Zirconium aluminium oxynitride multiphase composite film is deposited on zirconium
substrate using energetic nitrogen ions delivered from dense plasma Focus device. X-ray …

A silver target kept under partial vacuum conditions was irradiated with focused nanosecond
pulses at 1: 06 mm from a Nd: YAG laser. The electron emission monitored with a Langmuir …

Experiments are reported on sputter depth profiling of CrN/AlN multilayer abrasive coatings
by secondary ion mass spectrometry (SIMS) coupled with sample current measurements …

Substrate bias was applied for AlN deposition on rolled Ni sheet during pulse DC reactive
sputtering to overcome the difficulty caused by thermal expansion mismatch between Ni …

Abstracts Effect of target–substrate distance on the quality of AlN films grown on Si (110)
substrates by pulsed laser deposition (PLD) is carefully studied. It is found that the quality of …

A shadow-masked pulsed laser deposition (SPLD) technique has been used to fabricate TiN
thin film on a silicon substrate. By interposing a chosen mask of the appropriate size and …