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Low-temperature plasma processing for Si photovoltaics
SQ **ao, S Xu, K Ostrikov - Materials Science and Engineering: R: Reports, 2014 - Elsevier
There has been a recent rapid expansion of the range of applications of low-temperature
plasma processing in Si-based photovoltaic (PV) technologies. The desire to produce Si …
plasma processing in Si-based photovoltaic (PV) technologies. The desire to produce Si …
Surface plasmon enhancement of optical absorption in thin-film silicon solar cells
Strong electromagnetic field enhancement that occurs under conditions of the surface
plasmon excitation in metallic nanoparticles deposited on a semiconductor surface is a very …
plasmon excitation in metallic nanoparticles deposited on a semiconductor surface is a very …
Plasma-aided fabrication in Si-based photovoltaic applications: an overview
SQ **ao, S Xu - Journal of Physics D: Applied Physics, 2011 - iopscience.iop.org
Plasma-aided fabrication has been largely employed in the photovoltaic industry and widely
reported in the literature for the growth of Si-based solar cells and the dry etching of Si …
reported in the literature for the growth of Si-based solar cells and the dry etching of Si …
Efficient outdoor performance of esthetic bifacial a-Si: H semi-transparent PV modules
SY Myong, SW Jeon - Applied Energy, 2016 - Elsevier
We developed bifacial transparent back contact (TBC) hydrogenated amorphous silicon (a-
Si: H) semi-transparent glass-to-glass photovoltaic (PV) modules with emotionally …
Si: H) semi-transparent glass-to-glass photovoltaic (PV) modules with emotionally …
Hydrogenated amorphous silicon oxide solar cells fabricated near the phase transition between amorphous and microcrystalline structures
We investigated the properties of hydrogenated amorphous silicon oxide (a-Si 1-x O x: H)
deposited near the phase transition between amorphous and microcrystalline structures. a …
deposited near the phase transition between amorphous and microcrystalline structures. a …
Superstrate type flexible thin-film Si solar cells using flexible glass substrates
SY Myong, SW Kwon - Thin Solid Films, 2014 - Elsevier
We have investigated the flexible thin-film silicon (Si) solar cells fabricated on the flexible
glass substrates. The preliminary p–i–n type flexible hydrogenated amorphous silicon (a-Si …
glass substrates. The preliminary p–i–n type flexible hydrogenated amorphous silicon (a-Si …
Very high frequency plasma reactant for atomic layer deposition
Although plasma-enhanced atomic layer deposition (PE-ALD) results in several benefits in
the formation of high-k dielectrics, including a low processing temperature and improved film …
the formation of high-k dielectrics, including a low processing temperature and improved film …
Demonstration of Excellent Crystalline Silicon Surface Passivation (S < 1.27 cm s−1) by High‐Rate DC‐Sputtered Hydrogenated Amorphous Silicon
The surface passivation quality of intrinsic hydrogenated amorphous silicon (i‐a‐Si: H)
layers deposited by constant DC power‐facing target sputtering (FTS) technology is …
layers deposited by constant DC power‐facing target sputtering (FTS) technology is …
Antireflective coating using a WO3–TiO2 nanoparticle photocatalytic composition for high efficiency thin-film Si photovoltaic modules
HN Noh, SY Myong - Solar energy materials and solar cells, 2014 - Elsevier
We propose a cost-effective, low-temperature antireflective coating for the outer glass
substrates of 1.43 m 2 thin-film Si photovoltaic modules using a WO 3–TiO 2 nanoparticle …
substrates of 1.43 m 2 thin-film Si photovoltaic modules using a WO 3–TiO 2 nanoparticle …
Nitriding process for next-generation semiconductor devices by VHF (162 MHz) multi-tile push-pull plasma source
For the low power and high-performance semiconductor devices, a silicon oxynitride (SiO x
N y) layer is required as the gate sidewall spacer material by replacing oxygen of the silicon …
N y) layer is required as the gate sidewall spacer material by replacing oxygen of the silicon …