A Low-Noise MEMS Gravimeter Capable of Attaining Stable Low Resonant Frequency at Various Tilt Angles Through Adjusting Curved Beams' Width
W Weidong, Q Minghong, J Shilong… - … on Electron Devices, 2025 - ieeexplore.ieee.org
MEMS gravimeters capable of accurately measuring changes in gravitational acceleration
play a vital role in various application fields such as geological studies, crustal deformation …
play a vital role in various application fields such as geological studies, crustal deformation …
[HTML][HTML] Mass Sensing by Symmetry Breaking and Mode Localization in a System of Parametrically Excited Microbeam Resonators
NV Piskun, AV Lukin, IA Popov… - Russian Journal of …, 2024 - cyberleninka.ru
In this work, we study the nonlinear dynamics of a mode-localized mass detector. A system
of equations is obtained for two weakly coupled beam resonators with an alternating electric …
of equations is obtained for two weakly coupled beam resonators with an alternating electric …
Symmetry Breaking and Modal Localization in a System of Parametrically Excited Microbeam Resonators
NV Piskun, AV Lukin, IA Popov… - … Rossijskoj akademii nauk …, 2024 - innoscience.ru
In this work, we study the nonlinear dynamics of parametrically excited bending vibrations of
two weakly coupled beam microresonators under electrothermal excitation. A steady-state …
two weakly coupled beam microresonators under electrothermal excitation. A steady-state …