[HTML][HTML] On the trends and application of pattern density dependent isofocal dose of positive resists for 100 keV electron beam lithography

GG Lopez, G De Villafranca, M Azadi… - Journal of Vacuum …, 2018 - pubs.aip.org
This work examines the isofocality of four commercially available positive resists for electron
beam lithography (EBL) at 100 keV: AR-P 6200 (commercially known as CSAR 62) by …