On-chip multi-degree-of-freedom control of two-dimensional materials

H Tang, Y Wang, X Ni, K Watanabe, T Taniguchi… - Nature, 2024‏ - nature.com
Abstract Two-dimensional materials (2DM) and their heterostructures offer tunable electrical
and optical properties, primarily modifiable through electrostatic gating and twisting …

Electromechanical Sigma–Delta Modulators ( ) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review

F Chen, X Li, M Kraft - IEEE Sensors Journal, 2016‏ - ieeexplore.ieee.org
Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity

C Zhao, GS Wood, J **e, H Chang… - Journal of …, 2015‏ - ieeexplore.ieee.org
This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems
(MEMS) resonant sensing device consisting of three weakly coupled resonators with …

A nano-g MOEMS accelerometer featuring electromagnetic force balance with 157-dB dynamic range

Z Qu, H Ouyang, W **ong, Q Xu… - IEEE Transactions on …, 2023‏ - ieeexplore.ieee.org
This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer
that uses the principle of Fabry–Pérot (FP) interference in conjunction with a …

A high-precision and high-bandwidth MEMS-based capacitive accelerometer

A Utz, C Walk, A Stanitzki, M Mokhtari… - IEEE Sensors …, 2018‏ - ieeexplore.ieee.org
In this paper, we present a capacitive, MEMS-based accelerometer comprising an ultra-low
noise CMOS integrated readout-IC and a high-precision bulk micro machined sensing …

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams

H Hussein, C Wang, R Amendoeira Esteves… - Microsystems & …, 2024‏ - nature.com
Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting
stiffness properties. These mechanisms allow a wide range of positive and negative stiffness …

Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm

C Wang, Y Wang, W Fang, X Song, A Quan… - Microsystems & …, 2022‏ - nature.com
This paper describes a novel electrostatically actuated microgripper with freeform
geometries designed by a genetic algorithm. This new semiautomated design methodology …

Design and implementation of an out-of-plane electrostatic vibration energy harvester with dual-charged electret plates

K Tao, SW Lye, J Miao, X Hu - Microelectronic Engineering, 2015‏ - Elsevier
This paper presents the design, simulation and implementation of an out-of-plane
electrostatic power generator with dual-charged electret plates for low-level ambient kinetic …

Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

C Wang, X Song, W Fang, F Chen… - Microsystems & …, 2020‏ - nature.com
This paper describes a novel, semiautomated design methodology based on a genetic
algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) …

High-precision incremental capacitive angle encoder developed by micro fabrication technology

B Hou, B Zhou, L Yi, B **ng, X Li… - IEEE Transactions on …, 2020‏ - ieeexplore.ieee.org
This article proposes a high-precision incremental capacitive angle encoder based on
microfabrication technology. Compared to traditional printed circuit board technology, the …