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On-chip multi-degree-of-freedom control of two-dimensional materials
Abstract Two-dimensional materials (2DM) and their heterostructures offer tunable electrical
and optical properties, primarily modifiable through electrostatic gating and twisting …
and optical properties, primarily modifiable through electrostatic gating and twisting …
Electromechanical Sigma–Delta Modulators ( ) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review
Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …
for high resolution conversion from the analog to the digital domain. With relatively small …
A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity
This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems
(MEMS) resonant sensing device consisting of three weakly coupled resonators with …
(MEMS) resonant sensing device consisting of three weakly coupled resonators with …
A nano-g MOEMS accelerometer featuring electromagnetic force balance with 157-dB dynamic range
Z Qu, H Ouyang, W **ong, Q Xu… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer
that uses the principle of Fabry–Pérot (FP) interference in conjunction with a …
that uses the principle of Fabry–Pérot (FP) interference in conjunction with a …
A high-precision and high-bandwidth MEMS-based capacitive accelerometer
A Utz, C Walk, A Stanitzki, M Mokhtari… - IEEE Sensors …, 2018 - ieeexplore.ieee.org
In this paper, we present a capacitive, MEMS-based accelerometer comprising an ultra-low
noise CMOS integrated readout-IC and a high-precision bulk micro machined sensing …
noise CMOS integrated readout-IC and a high-precision bulk micro machined sensing …
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams
H Hussein, C Wang, R Amendoeira Esteves… - Microsystems & …, 2024 - nature.com
Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting
stiffness properties. These mechanisms allow a wide range of positive and negative stiffness …
stiffness properties. These mechanisms allow a wide range of positive and negative stiffness …
Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm
This paper describes a novel electrostatically actuated microgripper with freeform
geometries designed by a genetic algorithm. This new semiautomated design methodology …
geometries designed by a genetic algorithm. This new semiautomated design methodology …
Design and implementation of an out-of-plane electrostatic vibration energy harvester with dual-charged electret plates
This paper presents the design, simulation and implementation of an out-of-plane
electrostatic power generator with dual-charged electret plates for low-level ambient kinetic …
electrostatic power generator with dual-charged electret plates for low-level ambient kinetic …
Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm
This paper describes a novel, semiautomated design methodology based on a genetic
algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) …
algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) …
High-precision incremental capacitive angle encoder developed by micro fabrication technology
B Hou, B Zhou, L Yi, B **ng, X Li… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This article proposes a high-precision incremental capacitive angle encoder based on
microfabrication technology. Compared to traditional printed circuit board technology, the …
microfabrication technology. Compared to traditional printed circuit board technology, the …