Scheduling in semiconductor manufacturing is of vital importance due to the impact on
production performance indicators such as equipment utilization, cycle time, and delivery …

This paper reviews sampling techniques for inspection in semiconductor manufacturing. We
discuss the strengths and weaknesses of techniques developed in the last last 20 years for …

In order to maximize the information and thus to minimize risk from measurement and to take
into account measurement capacities, an algorithm is proposed to sample lots. An indicator …

(60) Provisional application No. 60/322,459,? led on Sep. Systems' methods 21nd medlums
are PIQVIde 'l for dynamlc 17 2001 provisional application NO '60/298 878 adjustment of …

Systems, methods and mediums are provided for dynamic adjustment of sampling plans in
connection with a wafer (or other device) to be measured. The invention adjusts the fre …

The defect of process equipments is a major factor that impairs the yields in the mass
production of semiconductor wafer fabrication and it is a main supervision means to use …

The in-line quality control measured data plays an increasingly important role in both the
control and the improvement of yields in the production process of semiconductor …

Semiconductor manufacturing is characterized by a dynamic, varying environment and the
technology to produce integrated circuits is always shifting in response to the demand for …

Metrology is an essential part of advanced semiconductor manufacturing. It accelerates yield
improvement and sustains yield performance at every stage in both new and mature …

Virtual Metrology (VM) predicts end-of-batch properties (metrology data) from measurable
input data composed of pre-process metrology and fault detection and classi cation (FDC) …