Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges

V Zardetto, BL Williams, A Perrotta… - Sustainable Energy & …, 2017 - pubs.rsc.org
Atomic layer deposition is widely acknowledged as a powerful technique for the deposition
of high quality layers for several applications including photovoltaics (PV). The capability of …

Initiated chemical vapor deposition: a versatile tool for various device applications

SJ Yu, K Pak, MJ Kwak, M Joo, BJ Kim… - Advanced …, 2018 - Wiley Online Library
Advances in device technology have been accompanied by the development of new types
of materials and device fabrication methods. Considering device design, initiated chemical …

Selective H2S/CO2 Separation by Metal–Organic Frameworks Based on Chemical-Physical Adsorption

J Liu, Y Wei, P Li, Y Zhao, R Zou - The Journal of Physical …, 2017 - ACS Publications
The removal of hydrogen sulfide (H2S) is essential in various industry applications such as
purification of syngas for avoiding its corrosion and toxicity to catalysts. The design of …

Atomic layer deposition of silicon nitride thin films: a review of recent progress, challenges, and outlooks

X Meng, YC Byun, HS Kim, JS Lee, AT Lucero… - Materials, 2016 - mdpi.com
With the continued miniaturization of devices in the semiconductor industry, atomic layer
deposition (ALD) of silicon nitride thin films (SiNx) has attracted great interest due to the …

Low-temperature plasma-assisted atomic layer deposition of silicon nitride moisture permeation barrier layers

AM Andringa, A Perrotta, K de Peuter… - … applied materials & …, 2015 - ACS Publications
Encapsulation of organic (opto-) electronic devices, such as organic light-emitting diodes
(OLEDs), photovoltaic cells, and field-effect transistors, is required to minimize device …

Growth of thin barrier films on flexible polymer substrates by atomic layer deposition

KL Jarvis, PJ Evans - Thin Solid Films, 2017 - Elsevier
Organic electronics research has received significant attention in recent years. The majority
of this research has focused on the development of organic photovoltaic cells (OPVs) and …

Low temperature temporal and spatial atomic layer deposition of TiO2 films

M Aghaee, PS Maydannik, P Johansson… - Journal of Vacuum …, 2015 - pubs.aip.org
Titanium dioxide films were grown by atomic layer deposition (ALD) using titanium
tetraisopropoxide as a titanium precursor and water, ozone, or oxygen plasma as …

[HTML][HTML] Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

J Schäfer, K Fricke, F Mika, Z Pokorná, L Zajíčková… - Thin Solid Films, 2017 - Elsevier
The present study introduces a process for the synthesis of functional films onto substrates
directly from the liquid phase. The reported method is based on the initialization of the …

On the role of micro-porosity in affecting the environmental stability of atomic/molecular layer deposited (ZnO) a (Zn–O–C 6 H 4–O) b films

M Aghaee, JP Niemelä, WMM Kessels… - Dalton Transactions, 2019 - pubs.rsc.org
Atomic/molecular layer deposited (ALD/MLD) inorganic–organic thin films form a novel class
of materials with tunable properties. In selected cases, hybrid materials are reported to show …

Metal-organic covalent network chemical vapor deposition for gas separation

ND Boscher, M Wang, A Perrotta, K Heinze, M Creatore… - 2016 - dspace.mit.edu
The chemical vapor deposition (CVD) polymerization of metalloporphyrin building units is
demonstrated to provide an easily up-scalable one-step method toward the deposition of a …