The development of MEMS actuators is rapidly evolving and continuously new progress in
terms of efficiency, power and force output is reported. Pneumatic and hydraulic are an …

Existing tactile stimulation technologies powered by small actuators offer low-resolution
stimuli compared to the enormous mechanoreceptor density of human skin. Arrays of soft …

Future space exploration will emphasize on cost effectiveness and highly focused mission
objectives. Missions costs are directly proportional to its total weight, thus, the trend will be to …

The NeuroMedicator is a micropump integrated with application-specific silicon microprobes
aimed for drug delivery in neural research with small animals. The micropump has outer …

Based on the performance requirements of safety and arming devices in a micro-electro-
mechanical fuse system, a type of pyrotechnical sliding micro-actuators were independently …

A study of solid propellant ignition and combustion of potassium dinitrobenzofuroxanate in
Joule-heating pyrotechnical microelectromechanical systems igniters is carried out using a …

In this technical report, we describe the use of a polystyrene Petri dish to fabricate thin,
freestanding polydimethylsiloxane (PDMS) membranes without using a sacrificial layer. We …

A cleanroom-free fabrication process adapted to microfluidic devices is presented for
pyrotechnical microelectromechanical systems balloon actuators. The actuators are …

The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented
herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet …

In order to solve the complexity of the structure, assembly process, component contact state
and working process of the propellant actuator by conventional methods, a novel design …