Heterogeneous 2.5 D integration on through silicon interposer

X Zhang, JK Lin, S Wickramanayaka, S Zhang… - Applied physics …, 2015 - pubs.aip.org
Driven by the need to reduce the power consumption of mobile devices, and servers/data
centers, and yet continue to deliver improved performance and experience by the end …

Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning

Q Sun, D Yang, T Liu, J Liu, S Wang, S Hu… - Microsystems & …, 2023 - nature.com
The Cu-filling process in through-silicon via (TSV-Cu) is a key technology for chip stacking
and three-dimensional vertical packaging. During this process, defects resulting from …

Study on Cu protrusion of through-silicon via

FX Che, WN Putra, A Heryanto, A Trigg… - IEEE Transactions …, 2013 - ieeexplore.ieee.org
The through-silicon via (TSV) approach is essential for 3-D integrated circuit (3-DIC)
packaging technology. TSV fabrication process, however, is still facing several challenges …

Signal integrity analysis of through-silicon via (TSV) with a silicon dioxide well to reduce leakage current for high-bandwidth memory interface

H Kim, S Lee, J Park, Y Shin, S Woo… - IEEE Transactions …, 2023 - ieeexplore.ieee.org
In this article, we propose and analyze a through silicon via (TSV) with a silicon dioxide well
(SDW) to reduce leakage current in the design of a high-speed signaling and low-power …

A high-efficiency design method of TSV array for thermal management of 3-D integrated system

X Wang, Y Yang, D Chen, D Li - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, a high-efficient design method of through silicon via (TSV) array for thermal
management of 3-dimensional (3-D) integrated system is developed based on the …

A review on warpage measurement metrologies for advanced electronic packaging

G Sun, S Zhang - Microelectronics Reliability, 2024 - Elsevier
In the post-Moore era, advanced electronic packaging technology emerges as a prominent
direction for the future evolution of semiconductor industry. Nevertheless, warpage remains …

Modelling and characterization on wafer to wafer hybrid bonding technology for 3D IC packaging

L Ji, FX Che, HM Ji, HY Li… - 2019 IEEE 21st …, 2019 - ieeexplore.ieee.org
For Wafer to Wafer Hybrid Bonding (W2W-HB) technology, warpage mitigation and precise
Cu to Cu bonding are required to ensure a robust bonding integrity. This paper documents a …

Manufacturability and stress issues in 3D silicon detector technology at IMB-CNM

D Quirion, M Manna, S Hidalgo, G Pellegrini - Micromachines, 2020 - mdpi.com
This paper provides an overview of 3D detectors fabrication technology developed in the
clean room of the Microelectronics Institute of Barcelona (IMB-CNM). Emphasis is put on …

Study of warpage evolution and control for six-side molded WLCSP in different packaging processes

F Qin, S Zhao, Y Dai, M Yang… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
A six-side molded wafer-level chip scale package (mWLCSP) is a novel and attractive
packaging method for smart phone applications due to its lower cost, better electrical …

Panel warpage of fan-out panel-level packaging using RDL-first technology

FX Che, K Yamamoto, VS Rao… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
In this study, fan-out panel-level packaging (FO-PLP) technology using a redistribution layer
(RDL) first approach is demonstrated using a large glass panel as a carrier (550 mm× 650 …