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Heterogeneous 2.5 D integration on through silicon interposer
Driven by the need to reduce the power consumption of mobile devices, and servers/data
centers, and yet continue to deliver improved performance and experience by the end …
centers, and yet continue to deliver improved performance and experience by the end …
Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning
Q Sun, D Yang, T Liu, J Liu, S Wang, S Hu… - Microsystems & …, 2023 - nature.com
The Cu-filling process in through-silicon via (TSV-Cu) is a key technology for chip stacking
and three-dimensional vertical packaging. During this process, defects resulting from …
and three-dimensional vertical packaging. During this process, defects resulting from …
Study on Cu protrusion of through-silicon via
The through-silicon via (TSV) approach is essential for 3-D integrated circuit (3-DIC)
packaging technology. TSV fabrication process, however, is still facing several challenges …
packaging technology. TSV fabrication process, however, is still facing several challenges …
Signal integrity analysis of through-silicon via (TSV) with a silicon dioxide well to reduce leakage current for high-bandwidth memory interface
In this article, we propose and analyze a through silicon via (TSV) with a silicon dioxide well
(SDW) to reduce leakage current in the design of a high-speed signaling and low-power …
(SDW) to reduce leakage current in the design of a high-speed signaling and low-power …
A high-efficiency design method of TSV array for thermal management of 3-D integrated system
In this article, a high-efficient design method of through silicon via (TSV) array for thermal
management of 3-dimensional (3-D) integrated system is developed based on the …
management of 3-dimensional (3-D) integrated system is developed based on the …
A review on warpage measurement metrologies for advanced electronic packaging
G Sun, S Zhang - Microelectronics Reliability, 2024 - Elsevier
In the post-Moore era, advanced electronic packaging technology emerges as a prominent
direction for the future evolution of semiconductor industry. Nevertheless, warpage remains …
direction for the future evolution of semiconductor industry. Nevertheless, warpage remains …
Modelling and characterization on wafer to wafer hybrid bonding technology for 3D IC packaging
For Wafer to Wafer Hybrid Bonding (W2W-HB) technology, warpage mitigation and precise
Cu to Cu bonding are required to ensure a robust bonding integrity. This paper documents a …
Cu to Cu bonding are required to ensure a robust bonding integrity. This paper documents a …
Manufacturability and stress issues in 3D silicon detector technology at IMB-CNM
This paper provides an overview of 3D detectors fabrication technology developed in the
clean room of the Microelectronics Institute of Barcelona (IMB-CNM). Emphasis is put on …
clean room of the Microelectronics Institute of Barcelona (IMB-CNM). Emphasis is put on …
Study of warpage evolution and control for six-side molded WLCSP in different packaging processes
F Qin, S Zhao, Y Dai, M Yang… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
A six-side molded wafer-level chip scale package (mWLCSP) is a novel and attractive
packaging method for smart phone applications due to its lower cost, better electrical …
packaging method for smart phone applications due to its lower cost, better electrical …
Panel warpage of fan-out panel-level packaging using RDL-first technology
In this study, fan-out panel-level packaging (FO-PLP) technology using a redistribution layer
(RDL) first approach is demonstrated using a large glass panel as a carrier (550 mm× 650 …
(RDL) first approach is demonstrated using a large glass panel as a carrier (550 mm× 650 …