With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

Wurtzite ferroelectrics are an emerging material class that expands the functionality and
application space of wide bandgap semiconductors. Promising physical properties of binary …

Scandium-doped aluminum nitride (AlScN) has generated great research interest owing to
its unique properties. The wurtzite-structure AlScN is compatible with the complementary …

The direct impact of structural quality on the ferroelectric properties of hexagonal Al 1–x Sc x
N with an Sc-content of x= 0.3 was investigated using dynamic hysteresis measurements …

Spurious modes (SMs) suppression and electromechanical coupling coefficient ()
improvement in Lamb wave resonators (LWRs) have always been the research hotspot. In …

A wide bandgap, an enhanced piezoelectric coefficient, and low dielectric permittivity are
some of the outstanding properties that have made Sc x Al 1− x N a promising material in …

Abstract Aluminum nitride (AlN) and Sc-doped AlN have become the most popular
piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite …

This paper reports on the deposition and characterization of piezoelectric AlXSc1-XN
(further: AlScN) films on Si substrates using AlSc alloy targets with 30 at.% Sc. Films were …

The high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW)
resonators have significantly advanced their application in sensing technologies. In this …

The discovery of ferroelectricity in polar wurtzite-based ternary materials, such as Al 1− x B x
N, has attracted attention due to their compatibility with complementary metal–oxide …