Ion implantation of advanced silicon devices: Past, present and future

MI Current - Materials Science in Semiconductor Processing, 2017 - Elsevier
Ion implantation has been a key enabler, along with improvements in lithography, for the
40+ year evolution of MOS and then CMOS devices. Alterations in the channel do** levels …

Multiscale modelling of irradiation in nanostructures

K Nordlund, F Djurabekova - Journal of Computational Electronics, 2014 - Springer
Ion and electron irradiation can be used to modify not only conventional materials such as
silicon, but also nanostructures. This opens up exciting possibilities for basic science studies …

Suppression of shear banding in amorphous ZrCuAl nanopillars by irradiation

Q **ao, L Huang, Y Shi - Journal of Applied Physics, 2013 - pubs.aip.org
Using molecular dynamics simulations, model Zr 50 Cu 40 Al 10 metallic glass (MG)
nanopillars were subjected to simulated irradiation processes followed by uniaxial …

Coupling effects of stress and ion irradiation on the mechanical behaviors of copper nanowires

ZY Yang, FF Jiao, ZX Lu, ZQ Wang - Science China Physics, Mechanics …, 2013 - Springer
By using molecular dynamics simulations, we studied the ion irradiation induced damage in
mechanically strained Cu nanowires and evaluated the effects of damage on the …

Deformation mechanisms of irradiated metallic nanofoams

LA Zepeda-Ruiz, E Martinez, M Caro, EG Fu… - Applied Physics …, 2013 - pubs.aip.org
It was recently proposed that within a particular window in the parameter space of
temperature, ion energy, dose rate, and filament diameter, nanoscale metallic foams could …

Influence of ion irradiation induced defects on mechanical properties of copper nanowires

W Li, L Sun, J Xue, J Wang, H Duan - … in Physics Research Section B: Beam …, 2013 - Elsevier
The mechanical properties of copper nanowires irradiated with energetic ions have been
investigated by using molecular dynamics simulations. The Cu ions with energies ranging …

Molecular dynamics of irradiation-induced defect production in GaN nanowires

W Ren, A Kuronen, K Nordlund - Physical Review B—Condensed Matter and …, 2012 - APS
We have used classical molecular dynamics methods to simulate the defect production of
small-cross-section GaN nanowires by Ar ion irradiation. We performed 200 random …

Argon clustering in silicon under low-energy irradiation: Molecular dynamics simulation with different Ar–Si potentials

AA Sycheva, EN Voronina, TV Rakhimova… - Journal of Vacuum …, 2018 - pubs.aip.org
In this paper, the authors carried out a molecular dynamics simulation of crystal and
amorphous silicon sputtering by low-energy (200 eV) Ar ions at normal incidence. The …

Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing

AA Sycheva, EN Voronina, TV Rakhimova… - Journal of Vacuum …, 2020 - pubs.aip.org
This paper deals with different mechanisms of the interaction of light and heavy low-energy
ions with nanoporous structures and main structural changes that occur in these structures …

Self-irradiation of thin SiC nanowires with low-energy ions: a molecular dynamics study

L Sun, C Lan, S Zhao, J Xue… - Journal of Physics D …, 2012 - iopscience.iop.org
Irradiation of ultra-thin silicon carbide nanowires (SiC NWs) with low-energy ions was
investigated with the molecular dynamics (MD) method. The energies of the incident Si and …