Ion implantation of advanced silicon devices: Past, present and future
MI Current - Materials Science in Semiconductor Processing, 2017 - Elsevier
Ion implantation has been a key enabler, along with improvements in lithography, for the
40+ year evolution of MOS and then CMOS devices. Alterations in the channel do** levels …
40+ year evolution of MOS and then CMOS devices. Alterations in the channel do** levels …
Multiscale modelling of irradiation in nanostructures
Ion and electron irradiation can be used to modify not only conventional materials such as
silicon, but also nanostructures. This opens up exciting possibilities for basic science studies …
silicon, but also nanostructures. This opens up exciting possibilities for basic science studies …
Suppression of shear banding in amorphous ZrCuAl nanopillars by irradiation
Using molecular dynamics simulations, model Zr 50 Cu 40 Al 10 metallic glass (MG)
nanopillars were subjected to simulated irradiation processes followed by uniaxial …
nanopillars were subjected to simulated irradiation processes followed by uniaxial …
Coupling effects of stress and ion irradiation on the mechanical behaviors of copper nanowires
ZY Yang, FF Jiao, ZX Lu, ZQ Wang - Science China Physics, Mechanics …, 2013 - Springer
By using molecular dynamics simulations, we studied the ion irradiation induced damage in
mechanically strained Cu nanowires and evaluated the effects of damage on the …
mechanically strained Cu nanowires and evaluated the effects of damage on the …
Deformation mechanisms of irradiated metallic nanofoams
It was recently proposed that within a particular window in the parameter space of
temperature, ion energy, dose rate, and filament diameter, nanoscale metallic foams could …
temperature, ion energy, dose rate, and filament diameter, nanoscale metallic foams could …
Influence of ion irradiation induced defects on mechanical properties of copper nanowires
The mechanical properties of copper nanowires irradiated with energetic ions have been
investigated by using molecular dynamics simulations. The Cu ions with energies ranging …
investigated by using molecular dynamics simulations. The Cu ions with energies ranging …
Molecular dynamics of irradiation-induced defect production in GaN nanowires
We have used classical molecular dynamics methods to simulate the defect production of
small-cross-section GaN nanowires by Ar ion irradiation. We performed 200 random …
small-cross-section GaN nanowires by Ar ion irradiation. We performed 200 random …
Argon clustering in silicon under low-energy irradiation: Molecular dynamics simulation with different Ar–Si potentials
AA Sycheva, EN Voronina, TV Rakhimova… - Journal of Vacuum …, 2018 - pubs.aip.org
In this paper, the authors carried out a molecular dynamics simulation of crystal and
amorphous silicon sputtering by low-energy (200 eV) Ar ions at normal incidence. The …
amorphous silicon sputtering by low-energy (200 eV) Ar ions at normal incidence. The …
Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing
AA Sycheva, EN Voronina, TV Rakhimova… - Journal of Vacuum …, 2020 - pubs.aip.org
This paper deals with different mechanisms of the interaction of light and heavy low-energy
ions with nanoporous structures and main structural changes that occur in these structures …
ions with nanoporous structures and main structural changes that occur in these structures …
Self-irradiation of thin SiC nanowires with low-energy ions: a molecular dynamics study
Irradiation of ultra-thin silicon carbide nanowires (SiC NWs) with low-energy ions was
investigated with the molecular dynamics (MD) method. The energies of the incident Si and …
investigated with the molecular dynamics (MD) method. The energies of the incident Si and …