The design and fabrication techniques for microelectromechanical systems (MEMS) and
nanodevices are progressing rapidly. However, due to material and process flow …

Micro-light emitting diode (micro-LED) is an emerging display technology with excellent
performance of high contrast, low power consumption, long lifetime, and fast response time …

After two decades of intensive development, 3-D integration has proven invaluable for
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …

Surface tension effects are known to be dominant at the submillimeter scale. Within this
context, the literature has extensively described the underlying physics (eg, surface tension …

This paper provides a comprehensive review of research efforts in the emerging field of
micro devices assembly (MDA) as well as identifies future directions for research. The …

Surface tension-driven self-alignment is a passive and highly-accurate positioning
mechanism that can significantly simplify and enhance the construction of advanced …

The packaging of microelectromechanical systems (MEMS) and nanoscale devices
constitutes an important area of research and development that is vital to the …

Hetero-integration of functional semiconductor layers and devices has received strong
research interest from both academia and industry. While conventional techniques such as …

This paper reports an in-depth study of a hybrid microassembly technique that combines a
robotic micromanipulator and a water droplet self-alignment, which greatly improves the …