Fabrication method for III-V heterostructure field-effect transistors

JB Boos, W Kruppa - US Patent 5,364,816, 1994 - Google Patents
[57] ABSTRACT A heterojunction device, and a method for producing the device. A gate air
bridge is formed at the mesa sidewall between the active region and the gate bonding pad …

High performance InP/InAlAs/GaAsSb/InP double heterojunction bipolar transistors

SW Cho, JH Yun, DH Jun, JI Song, I Adesida, N Pan… - Solid-state …, 2006 - Elsevier
DC and RF characteristics of InP/InAlAs/GaAsSb/InP double heterojunction bipolar
transistors (DHBTs) are reported. The device heterostructures include InAlAs spacer layer …

Si/Si/sub 1-x/Gex heterojunction bipolar transistors with high breakdown voltage

KD Hobart, FJ Kub, NA Papanicoloau… - IEEE electron device …, 1995 - ieeexplore.ieee.org
Heterojunction bipolar transistors are desirable for microwave applications because a low
base resistance can be achieved yielding high maximum frequency of oscillation. Here we …

Reduction of base-collector capacitance in InP/InGaAs HBT's using a novel double polyimide planarization process

H Shin, C Gaessler, H Leier - IEEE Electron Device Letters, 1998 - ieeexplore.ieee.org
The parasitic base-collector capacitance (C/sub BC/) in InP/InGaAs heterojunction bipolar
transistors (HBTs) has been reduced using a novel double polyimide planarization process …

Design and performance of InP/GaAsSb/InP double heterojunction bipolar transistors

MW Dvorak, N Matine, CR Bolognesi, XG Xu… - Journal of Vacuum …, 2000 - pubs.aip.org
We report a fabrication technique for 1 μm wide emitter finger InP/GaAs 0.51 Sb 0.49/InP
double heterojunction bipolar transistors (DHBTs). In this technology, we use a wet-etched …

480-GHz in InP/GaAsSb/InP DHBT With New Base Isolation -Airbridge Design

M Zaknoune, E Mairiaux, Y Roelens… - IEEE electron device …, 2012 - ieeexplore.ieee.org
Self-aligned 0.55*3.5\mum^2 emitter InP/GaAsSb/InP double heterojunction bipolar
transistors demonstrating an f_t of 310 GHz and an f_\max of 480 GHz are reported …

[PDF][PDF] Monolithic microwave integrated circuits based on InP/GaAsSb double heterojunction bipolar transistors

R Flückiger - 2015 - research-collection.ethz.ch
Abstract (Ga, In)(As, Sb)-based InP double heterojunction bipolar transistors (DHBTs) exhibit
excellent RF performance combined with a high power handling capability, making them …

A high-performance AlInAs/InGaAs/InP DHBT K-band power cell

RS Virk, MY Chen, C Nguyen, T Liu… - IEEE microwave and …, 1997 - ieeexplore.ieee.org
In this work the device design and power performance of several AlInAs/InGaAs/InP double
heterojunction bipolar transistors (DHBTs) are reported for 18 GHz. The power cells utilize a …

Reduction of extrinsic base-collector capacitance in InP/InGaAs SHBTs using a new base pad design

Y Song, K Yang - … 14th Indium Phosphide and Related Materials …, 2002 - ieeexplore.ieee.org
A method to isolate the base pad from the intrinsic device structure for reducing the extrinsic
base-collector capacitance of InP/InGaAs single heterojunction bipolar transistors (SHBTs) …

Process optimization for high frequency performance of InP-based heterojunction bipolar transistors

Y Song, Y Jeong, K Yang - JSTS: Journal of Semiconductor …, 2003 - koreascience.kr
In this work, process optimization techniques for high frequency performance of HBTs are
presented. The techniques are focused on reducing parasitic base resistance and base …