The integration of microactuators within a silicon photonic chip gave rise to the field of
optical micro‐electro‐mechanical systems (MEMS) that was originally driven by the …

In this paper, we report subwavelength deeply etched 1000-nm-thick silicon layers using
deep etching on an SOI substrate. The subwavelength silicon layers are used to construct …

Notch filters are used in spectroscopy, multi-photon microscopy, fluorescence
instrumentation, optical sensors and other life science applications. One type of notch filter is …

This work reports a novel structure for a Fabry–Pérot micro cavity that combines the highest
reported quality factor for an on-chip Fabry–Pérot resonator that exceeds 9800, and a very …

In the scope of miniaturized optical sensors for liquid refractometry, this work details the
design, numerical simulation, and experimental characterization of a Fabry-Pérot resonator …

This work reports the design and opto-mechanical characterization of high velocity comb-
drive actuators producing in-plane motion and fabricated using the technology of deep …

Attaching sensitive materials to the tip of an optical fiber has been a successful strategy,
extensively used to develop selective and highly sensitive sensors. In this work, we …

Temperature measuring is a daily procedure carried out worldwide in practically all
environments of human activity, but it takes particular relevance in industrial, scientific …

Optical phase modulators are essential building components in a wide range of
applications, for instance, optical communication systems, tunable lasers, optical phase …

We theoretically study the spectral characteristics and noise performance of wavelength-
interrogated fiber-optic sensors based on an extrinsic Fabry–Perot (FP) interferometer (EFPI) …