This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

The article presents a fully integrated multimodal and multifunctional CMOS
biosensing/actuating array chip and system for multi-dimensional cellular/tissue …

A fully integrated SoC for multimodality intracranial neuromonitoring is presented in this
paper. Three sensors including a capacitive MEMS pressure sensor, an electrochemical …

In this work, we present the biopackaging andintegration method of an intracranial pressure
microsystemfor multimodal neural monitoring. The neural monitoring chipused is a System …

This paper demonstrates a smart catheter system with intracranial pressure (ICP) and
temperature sensing capability which is designed for real-time monitoring in traumatic brain …