Dielectric barrier, etch stop, and metal cap** materials for state of the art and beyond metal interconnects
SW King - ECS Journal of Solid State Science and Technology, 2014 - iopscience.iop.org
Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …
Off the Beaten Track—A Hitchhiker's Guide to Beryllium Chemistry
D Naglav, MR Buchner, G Bendt… - Angewandte Chemie …, 2016 - Wiley Online Library
This Minireview aims to give an introduction to beryllium chemistry for all less‐experienced
scientists in this field of research. Up to date information on the toxicity of beryllium and its …
scientists in this field of research. Up to date information on the toxicity of beryllium and its …
[HTML][HTML] Thermal conductivity and thermal boundary resistance of atomic layer deposited high-k dielectric aluminum oxide, hafnium oxide, and titanium oxide thin films …
The need for increased control of layer thickness and uniformity as device dimensions shrink
has spurred increased use of atomic layer deposition (ALD) for thin film growth. The ability to …
has spurred increased use of atomic layer deposition (ALD) for thin film growth. The ability to …
Investigation and review of the thermal, mechanical, electrical, optical, and structural properties of atomic layer deposited high-k dielectrics: Beryllium oxide, aluminum …
Atomic layer deposited (ALD) high-dielectric-constant (high-k) materials have found
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …
Recent developments in molecular precursors for atomic layer deposition
AL Johnson, JD Parish - 2018 - books.rsc.org
One field of organometallic and materials chemistry that has seen great advancements over
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
the last 20 years is that of atomic layer deposition (ALD), and in particular the development …
[HTML][HTML] Epitaxial integration of high-mobility La-doped BaSnO3 thin films with silicon
La-doped BaSnO 3 has been epitaxially integrated with (001) Si using an SrTiO 3 buffer
layer via molecular-beam epitaxy (MBE). A 254 nm thick undoped BaSnO 3 buffer layer was …
layer via molecular-beam epitaxy (MBE). A 254 nm thick undoped BaSnO 3 buffer layer was …
Low-temperature crystallization of BeO-assisted polycrystalline germanium layer for monolithic 3D integration
H Bong, Y Jang, D Jung, Y Cho, W Choi, D Ahn… - Applied Surface …, 2024 - Elsevier
We demonstrated a new method for the low-temperature solid-phase crystallization (SPC) of
germanium on beryllium oxide (BeO) films for monolithic 3D (M3D) integration. Using a …
germanium on beryllium oxide (BeO) films for monolithic 3D (M3D) integration. Using a …
Energy band offsets of BeO dielectrics grown via atomic-layer deposition on β-Ga2O3 substrates
We report the energy-band alignment of atomic layer-deposited (ALD) beryllium oxide (BeO)
films and β-Ga 2 O 3 substrates. BeO is a unique oxide with a high dielectric constant and …
films and β-Ga 2 O 3 substrates. BeO is a unique oxide with a high dielectric constant and …
Effects of hot-rolling on secondary electron yield properties of Cu-2.7 Be alloy
D Zhu, Q Zeng, Y Liu, C Li, L Lu, T Han, G **e… - Journal of Alloys and …, 2022 - Elsevier
The effects of hot-rolling on the secondary electron property evolution of activated Cu-2.7 Be
sheets were investigated in this study. The microstructures of both pristine and activated Cu …
sheets were investigated in this study. The microstructures of both pristine and activated Cu …
Metal carbonates as anode materials for lithium ion batteries
L Shao, R Ma, K Wu, M Shui, M Lao, D Wang… - Journal of alloys and …, 2013 - Elsevier
Six metal carbonates (Li 2 CO 3, Na 2 CO 3, SrCO 3, BaCO 3, K 2 CO 3, CoCO 3) are tested
and compared as anode materials for lithium ion batteries. The electrochemical results show …
and compared as anode materials for lithium ion batteries. The electrochemical results show …