[PDF][PDF] Progress in detection and suppression techniques for processing-induced sub-surface defects of fused silica optical elements
陈明君， 王会尧， 程健， 赵林杰， 杨浩， 刘启… - Journal of mechanical …, 2021 - qikan.cmes.org
Since fused silica material possesses good mechanical properties, thermal and optical
properties, such as high hardness, low coefficient of thermal expansion, and wide …
properties, such as high hardness, low coefficient of thermal expansion, and wide …
A novel liquid film shearing polishing technique for silicon carbide and its processing damage mechanisms
As a third-generation semiconductor material, single-crystal 4H-SiC possesses exceptional
properties such as high bandgap, high breakdown voltage, high thermal conductivity, and …
properties such as high bandgap, high breakdown voltage, high thermal conductivity, and …
Analysis on formation mechanism of ultra-smooth surfaces in atmospheric pressure plasma polishing
Atmospheric pressure plasma polishing (APPP) is developed for the final finishing of high
quality ultra-smooth surfaces. To improve surface quality, formation mechanism of ultra …
quality ultra-smooth surfaces. To improve surface quality, formation mechanism of ultra …
The effect of RIE-modified surface contamination on optical performance of fused silica
L Sun, H Liu, J Huang, X Ye, Q Cheng… - Pacific Rim Laser …, 2013 - spiedigitallibrary.org
A series of fused silica surface have been created by reaction ion etching to determine the
effect of the contamination level on surface state and optical performance of the optics. The …
effect of the contamination level on surface state and optical performance of the optics. The …
[PDF][PDF] 熔石英光学元件加工亚表面缺陷检测及抑制技术研究进展
陈明君， 王会尧， 程健， 赵林杰， 杨浩， 刘启， 谭超… - 机械工程 …, 2021 - qikan.cmes.org
熔石英材料因具有硬度大, 热膨胀系数低, 透射光谱范围广等良好的机械性能和热学, 光学特性,
广泛应用于国防, 航天等领域中关键光学元件的制造. 作为一种典型的硬脆材料 …
广泛应用于国防, 航天等领域中关键光学元件的制造. 作为一种典型的硬脆材料 …
Surface quality improvement of atmospheric pressure plasma polishing (APPP) in machining of silicon ultra-smooth surfaces
To produce ultra-smooth optical surfaces on hard brittle materials and functional crystal
materials without surface damage, atmospheric pressure plasma polishing (APPP) is …
materials without surface damage, atmospheric pressure plasma polishing (APPP) is …
Improvement of plasma jet in atmospheric pressure plasma polishing
Atmospheric pressure plasma polishing is an efficient method to achieve ultra-smooth
surfaces. The employed plasma torch is a widely adopted tool to generate stable plasma jet …
surfaces. The employed plasma torch is a widely adopted tool to generate stable plasma jet …
[CITATION][C] 纳米颗粒胶体动压空化射流抛光技术初探 (英文)
王星， 张勇， 张飞虎， 张玲花， 周明 - 纳米技术与精密工程, 2011