[HTML][HTML] Advances and significances of nanoparticles in semiconductor applications–A review
This review paper gives an overview of recent developments in nanoparticle research and
semiconductor industry applications. Nanoparticles have become useful building blocks for …
semiconductor industry applications. Nanoparticles have become useful building blocks for …
Plasma-controlled surface wettability: Recent advances and future applications
Materials with the desirable surface wettability are of key importance in diverse applications.
However, most of the existing chemical processes used for surface wettability control are …
However, most of the existing chemical processes used for surface wettability control are …
The future for plasma science and technology
The application of gas discharge plasmas has assumed an important place in many
manufacturing processes. Plasma methods contribute significantly to the economic …
manufacturing processes. Plasma methods contribute significantly to the economic …
[HTML][HTML] Lithography-based methods to manufacture biomaterials at small scales
Along with the search for new therapeutic agents, advanced formulation and fabrication of
drug carriers are required for better targeting, sensing, and responding to environmental …
drug carriers are required for better targeting, sensing, and responding to environmental …
Wafer-level InP-Si covalent bonding and defect-free heterointerface for photonic quantum systems
Heterogeneous integration of indium phosphide (InP) onto the Si platform via plasma-
activated bonding enables efficient evanescent coupling with lower dislocation density …
activated bonding enables efficient evanescent coupling with lower dislocation density …
Integrated sensors for soft medical robotics
Minimally invasive procedures assisted by soft robots for surgery, diagnostics, and drug
delivery have unprecedented benefits over traditional solutions from both patient and …
delivery have unprecedented benefits over traditional solutions from both patient and …
Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics
Plasma etching, a conventional technique in semiconductor industry, has exhibited great
potentials in fabricating nanoscale patterns by taking advantage of its high anisotropic …
potentials in fabricating nanoscale patterns by taking advantage of its high anisotropic …
Plasma technology in antimicrobial surface engineering
The design of advanced materials with superb anti-bacterial efficiency by engineering
appropriate surface properties has now become a consolidated strategy to improve the …
appropriate surface properties has now become a consolidated strategy to improve the …
Single-crystalline SiC integrated onto Si-based substrates via plasma-activated direct bonding
We propose a plasma-activated direct bonding process at low temperatures (≤ 200° C) to
form heterostructures between single-crystalline SiC and conventional Si-based substrates …
form heterostructures between single-crystalline SiC and conventional Si-based substrates …
A conceptual model to enable prescriptive maintenance for etching equipment in semiconductor manufacturing
The high equipment intensity and complexity of production processes in semiconductor
manufacturing leads to challenging requirements regarding plant availability in this …
manufacturing leads to challenging requirements regarding plant availability in this …