[HTML][HTML] Advances and significances of nanoparticles in semiconductor applications–A review

N Hossain, MH Mobarak, MA Mimona, MA Islam… - Results in …, 2023 - Elsevier
This review paper gives an overview of recent developments in nanoparticle research and
semiconductor industry applications. Nanoparticles have become useful building blocks for …

Plasma-controlled surface wettability: Recent advances and future applications

C Ma, A Nikiforov, D Hegemann… - International …, 2023 - Taylor & Francis
Materials with the desirable surface wettability are of key importance in diverse applications.
However, most of the existing chemical processes used for surface wettability control are …

The future for plasma science and technology

KD Weltmann, JF Kolb, M Holub… - Plasma Processes …, 2019 - Wiley Online Library
The application of gas discharge plasmas has assumed an important place in many
manufacturing processes. Plasma methods contribute significantly to the economic …

[HTML][HTML] Lithography-based methods to manufacture biomaterials at small scales

KTM Tran, TD Nguyen - Journal of Science: Advanced Materials and …, 2017 - Elsevier
Along with the search for new therapeutic agents, advanced formulation and fabrication of
drug carriers are required for better targeting, sensing, and responding to environmental …

Wafer-level InP-Si covalent bonding and defect-free heterointerface for photonic quantum systems

Q Kang, F Niu, G Li, K Liu, T Suga, C Wang - Applied Surface Science, 2024 - Elsevier
Heterogeneous integration of indium phosphide (InP) onto the Si platform via plasma-
activated bonding enables efficient evanescent coupling with lower dislocation density …

Integrated sensors for soft medical robotics

Y Qiu, A Ashok, CC Nguyen, Y Yamauchi, TN Do… - Small, 2024 - Wiley Online Library
Minimally invasive procedures assisted by soft robots for surgery, diagnostics, and drug
delivery have unprecedented benefits over traditional solutions from both patient and …

Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics

B He, Y Yang, MF Yuen, XF Chen, CS Lee, WJ Zhang - Nano Today, 2013 - Elsevier
Plasma etching, a conventional technique in semiconductor industry, has exhibited great
potentials in fabricating nanoscale patterns by taking advantage of its high anisotropic …

Plasma technology in antimicrobial surface engineering

A Nikiforov, C Ma, A Choukourov… - Journal of Applied …, 2022 - pubs.aip.org
The design of advanced materials with superb anti-bacterial efficiency by engineering
appropriate surface properties has now become a consolidated strategy to improve the …

Single-crystalline SiC integrated onto Si-based substrates via plasma-activated direct bonding

Q Kang, C Wang, F Niu, S Zhou, J Xu, Y Tian - Ceramics International, 2020 - Elsevier
We propose a plasma-activated direct bonding process at low temperatures (≤ 200° C) to
form heterostructures between single-crystalline SiC and conventional Si-based substrates …

A conceptual model to enable prescriptive maintenance for etching equipment in semiconductor manufacturing

F Biebl, R Glawar, A Jalali, F Ansari, B Haslhofer… - Procedia CIRP, 2020 - Elsevier
The high equipment intensity and complexity of production processes in semiconductor
manufacturing leads to challenging requirements regarding plant availability in this …