Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …

This work presents a high-performance Lamé mode resonator with high Q values. The
anchor loss and thermoelastic dam** (TED) were effectively decreased with the optimized …

This paper presents a thin-film wafer-level encapsulation process based on an epitaxial
deposition seal that incorporates both narrow and wide lateral transduction gaps (0.7-50 …

We present an experimental study of conservative nonlinearities in bulk acoustic mode (bulk-
mode) silicon MEMS resonators with degenerate do**. Three types of bulk acoustic mode …

We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …

Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is still
attracting increasing interest from the sensors community especially when the nonlinear …

This work presents a 20.2 MHz, 1.1 Million quality factor silicon MEMS resonator with sub
10mW ovenization power and±1.5 ppb (parts-per-billion) frequency offset over 100° C …

This article develops a nonclassical model to analyze bending response of squared
perforated microbeams considering the coupled effect of microstructure and surface stress …

In this work, simple analytical models based on the concept of an equivalent material are
used to describe the mechanical behavior of resonators perforated by a regular array of …

We present a wafer-level vacuum-encapsulated silicon resonator fabricated in MEMS
Integrated Design for Inertial Sensors, a commercial pure-play MEMS process, recently …