Methods and systems for discovery of defects of interest (DOI) buried within three
dimensional semiconductor struc tures and recipe optimization are described herein. The …

Methods and systems for improved detection and classifi cation of defects of interest (DOI)
on semiconductor wafers based on three-dimensional images are described herein. Three …

An apparatus that detects a material within a sample includes signal generation circuitry that
generates a first signal having at least one orbital angular momentum applied thereto and …

US9733108B2 - Method and apparatus for remote sensing using optical orbital angular momentum
(OAM)-based spectroscopy for detecting lateral motion of a remote object - Google Patents …

Methods and systems for accurately locating buried defects previously detected by an
inspection system are described herein. A physical mark is made on the surface of a wafer …

Disclosed are methods and apparatus for facilitating defect detection in a multilayer stack.
The method includes selec tion of a set of structure parameters for modeling a particular …

NOESYZHRGYRDHS-UHFFFAOYSA-N insulin Chemical compound N1C (= O) C (NC (= O)
C (CCC (N)= O) NC (= O) C (CCC (O)= O) NC (= O) C (C (C) C) NC (= O) C (NC (= O) CN) C …

An apparatus detects a material within a sample and includes signal generation circuitry that
generates a first light beam having at least one orbital angular momentum applied thereto …

An ellipsometer uses a broadband light source and a Fresnel cone to produce a
simultaneous broadband polarization state generator with no moving parts. The detector of …

Disclosed herein is an inspecting apparatus including an illuminating unit adapted to be
positioned in the periphery of a transparent member for illuminating the transparent member …